Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide

Koichi Suematsu, Wataru Harano, Tokiharu Oyama, Nan Ma, Ken Watanabe, Kengo Shimanoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Miniaturized semiconductor gas sensors composed of microheater and a sensor electrode allowed a rapid heater switching, pulse-driven operation. SnO2 nanoparticles was fabricated on the gas sensor device, and the sensor was driven during heater on phase at elevated temperature. Additionally, the gas was introducing into the sensing layer during heater off phase, cooling the sensing layer. On the basis of the behavior of the electrical resistance under pulse-driving, we determined the various types of sensor responses to improve the gas sensing characteristics. The gas sensitivity was drastically enhanced by pulse-driving mode, because utility factor of the pulse-driven sensor was higher than that of conventional sensor. Additionally, newly gas sensing definition also enhanced the gas selectivity, because gas accumulates in the sensing layer during heater off phase. Therefore, pulse-driving mode improved the ability of semiconductor gas sensors.

Original languageEnglish
Title of host publicationISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538683279
DOIs
Publication statusPublished - May 2019
Event18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019 - Fukuoka, Japan
Duration: May 26 2019May 29 2019

Publication series

NameISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings

Conference

Conference18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019
CountryJapan
CityFukuoka
Period5/26/195/29/19

Fingerprint

Tin dioxide
dioxides
microelectromechanical systems
MEMS
tin
sensors
Sensors
pulses
Chemical sensors
Gases
gases
heaters
Semiconductor materials
Acoustic impedance
Nanoparticles
electrical resistance
Cooling
Electrodes
selectivity
cooling

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Instrumentation

Cite this

Suematsu, K., Harano, W., Oyama, T., Ma, N., Watanabe, K., & Shimanoe, K. (2019). Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide. In ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings [8823211] (ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOEN.2019.8823211

Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide. / Suematsu, Koichi; Harano, Wataru; Oyama, Tokiharu; Ma, Nan; Watanabe, Ken; Shimanoe, Kengo.

ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8823211 (ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Suematsu, K, Harano, W, Oyama, T, Ma, N, Watanabe, K & Shimanoe, K 2019, Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide. in ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings., 8823211, ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings, Institute of Electrical and Electronics Engineers Inc., 18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019, Fukuoka, Japan, 5/26/19. https://doi.org/10.1109/ISOEN.2019.8823211
Suematsu K, Harano W, Oyama T, Ma N, Watanabe K, Shimanoe K. Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide. In ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8823211. (ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings). https://doi.org/10.1109/ISOEN.2019.8823211
Suematsu, Koichi ; Harano, Wataru ; Oyama, Tokiharu ; Ma, Nan ; Watanabe, Ken ; Shimanoe, Kengo. / Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide. ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings).
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