Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide

Koichi Suematsu, Wataru Harano, Tokiharu Oyama, Nan Ma, Ken Watanabe, Kengo Shimanoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Miniaturized semiconductor gas sensors composed of microheater and a sensor electrode allowed a rapid heater switching, pulse-driven operation. SnO2 nanoparticles was fabricated on the gas sensor device, and the sensor was driven during heater on phase at elevated temperature. Additionally, the gas was introducing into the sensing layer during heater off phase, cooling the sensing layer. On the basis of the behavior of the electrical resistance under pulse-driving, we determined the various types of sensor responses to improve the gas sensing characteristics. The gas sensitivity was drastically enhanced by pulse-driving mode, because utility factor of the pulse-driven sensor was higher than that of conventional sensor. Additionally, newly gas sensing definition also enhanced the gas selectivity, because gas accumulates in the sensing layer during heater off phase. Therefore, pulse-driving mode improved the ability of semiconductor gas sensors.

Original languageEnglish
Title of host publicationISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538683279
DOIs
Publication statusPublished - May 2019
Event18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019 - Fukuoka, Japan
Duration: May 26 2019May 29 2019

Publication series

NameISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings

Conference

Conference18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019
Country/TerritoryJapan
CityFukuoka
Period5/26/195/29/19

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Instrumentation

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