Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

Yuichiro Ezoe, Ikuyuki Mitsuishi, Utako Takagi, Masaki Koshiishi, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Takaya Ohashi, Fumiki Kato, Susumu Sugiyama, Raul E. Riveros, Hitomi Yamaguchi, Shinya Fujihira, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

Research output: Contribution to journalArticle

40 Citations (Scopus)

Abstract

We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. In our method, curvilinear micro pore structures are firstly fabricated by silicon deep reactive ion etching (DRIE) or X-ray LIGA processes. Secondly, side walls of the micro structures are smoothed by magnetic field assisted finishing and/or hydrogen annealing techniques for high reflectivity mirrors. Thirdly, to focus parallel X-ray lights from astronomical objects, these structures are elastically or plastically bent into a spherical shape. Fourthly, the bent structures are stacked to form a multistage X-ray telescope. In this paper, we report on fabrication and X-ray reflection tests of silicon and nickel X-ray mirrors using the DRIE and LIGA processes, respectively. For the first time, X-ray reflections were confirmed on both of the mirrors. Estimated rms roughnesses were 5 nm and 3 nm for the silicon and nickel mirrors, respectively.

Original languageEnglish
Pages (from-to)1633-1641
Number of pages9
JournalMicrosystem Technologies
Volume16
Issue number8-9
DOIs
Publication statusPublished - Aug 1 2010
Externally publishedYes

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Ezoe, Y., Mitsuishi, I., Takagi, U., Koshiishi, M., Mitsuda, K., Yamasaki, N. Y., ... Maeda, R. (2010). Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes. Microsystem Technologies, 16(8-9), 1633-1641. https://doi.org/10.1007/s00542-009-0981-4