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Ultra-low temperature (≤300 °C) growth of Ge-rich SiGe by solid-liquid-coexisting annealing of a-GeSn/c-Si structures
Taizoh Sadoh, Hironori Chikita, Ryo Matsumura, Masanobu Miyao
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)