Ultrananocrystalline diamond prepared by pulsed laser deposition

Takeshi Hara, Tsuyoshi Yoshitake, Tomohito Fukugawa, Hironori Kubo, Masaru Itakura, Noriyuki Kuwano, Yoshitsugu Tomokiyo, Kunihito Nagayama

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Ultrananocrystalline diamond (UNCD) and sp2 amorphous carbon composite thin films were grown on sapphire (0001) substrates heated to 550 °C in 4 Torr hydrogen by pulsed laser deposition (PLD) using a graphite target. Transmission electron microscopy revealed that the deposited films consisted of dense non-oriented UNCDs with diameters of approximately 5 nm. The central area of the film, corresponding to the plume center, shows the maximum film thickness and maximum density of UNCDs. In order to achieve UNCD growth by PLD, it is critical that highly energetic species arrive in high density at the substrate accompanied by sufficient ambient hydrogen.

Original languageEnglish
Pages (from-to)649-653
Number of pages5
JournalDiamond and Related Materials
Volume15
Issue number4-8
DOIs
Publication statusPublished - Apr 2006

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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