@inproceedings{5a43ed645982424b8974cb9121ac6f53,
title = "Ultrananocrystalline diamond/hydrogenated amorphous carbon films prepared by a coaxial arc plasma gun",
abstract = "Growth of ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films without initial nucleation was realized by an coaxial arc plasma gun at a substrate-temperature of 550 °C and hydrogen-atmosphere of 53.3 Pa. The pulsed arc discharge was triggered at a repetition rate of 1 Hz. The deposition rate was 80 nm/min. X-ray diffraction measurements with 12-keV X-rays from synchrotron radiation indicated extremely broad rings from diamond and none from graphite. The UNCD crystallite diameters were estimated to be approximately 1.3 nanometers by using Scherrer's equation. The sp 3/(sp2+sp3) was estimated to be approximately 57% from the X-ray photoemission spectroscopy. The coaxial arc plasma gun is a new powerful method that might enable us to realize the supersaturated condition with highly energetic ions for the growth of UNCD.",
author = "You Nakagawa and Tsuyoshi Yoshitake and Kenji Hanada and Akira Nagano and Ryota Ohtani and Kazushi Sumitani and Hiroyuki Setoyama and Eiichi Kobayashi and Masaaki Hirakawa and Koichi Yamaguchi and Naoki Tsukahara and Yoshiaki Agawa and Kunihito Nagayama",
year = "2010",
month = feb,
day = "9",
doi = "10.4028/www.scientific.net/MSF.638-642.2927",
language = "English",
isbn = "0878492941",
series = "Materials Science Forum",
pages = "2927--2932",
booktitle = "THERMEC 2009",
note = "6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009 ; Conference date: 25-08-2009 Through 29-08-2009",
}