Ultrananocrystalline diamond/hydrogenated amorphous carbon films prepared by a coaxial arc plasma gun

You Nakagawa, Tsuyoshi Yoshitake, Kenji Hanada, Akira Nagano, Ryota Ohtani, Kazushi Sumitani, Hiroyuki Setoyama, Eiichi Kobayashi, Masaaki Hirakawa, Koichi Yamaguchi, Naoki Tsukahara, Yoshiaki Agawa, Kunihito Nagayama

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    Growth of ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films without initial nucleation was realized by an coaxial arc plasma gun at a substrate-temperature of 550 °C and hydrogen-atmosphere of 53.3 Pa. The pulsed arc discharge was triggered at a repetition rate of 1 Hz. The deposition rate was 80 nm/min. X-ray diffraction measurements with 12-keV X-rays from synchrotron radiation indicated extremely broad rings from diamond and none from graphite. The UNCD crystallite diameters were estimated to be approximately 1.3 nanometers by using Scherrer's equation. The sp 3/(sp2+sp3) was estimated to be approximately 57% from the X-ray photoemission spectroscopy. The coaxial arc plasma gun is a new powerful method that might enable us to realize the supersaturated condition with highly energetic ions for the growth of UNCD.

    Original languageEnglish
    Title of host publicationTHERMEC 2009
    Pages2927-2932
    Number of pages6
    DOIs
    Publication statusPublished - Feb 9 2010
    Event6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009 - Berlin, Germany
    Duration: Aug 25 2009Aug 29 2009

    Publication series

    NameMaterials Science Forum
    Volume638-642
    ISSN (Print)0255-5476

    Other

    Other6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009
    CountryGermany
    CityBerlin
    Period8/25/098/29/09

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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  • Cite this

    Nakagawa, Y., Yoshitake, T., Hanada, K., Nagano, A., Ohtani, R., Sumitani, K., Setoyama, H., Kobayashi, E., Hirakawa, M., Yamaguchi, K., Tsukahara, N., Agawa, Y., & Nagayama, K. (2010). Ultrananocrystalline diamond/hydrogenated amorphous carbon films prepared by a coaxial arc plasma gun. In THERMEC 2009 (pp. 2927-2932). (Materials Science Forum; Vol. 638-642). https://doi.org/10.4028/www.scientific.net/MSF.638-642.2927