TY - JOUR
T1 - Understanding of scanning-system distortions of atomic-scale scanning transmission electron microscopy images for accurate lattice parameter measurements
AU - Fujinaka, Syota
AU - Sato, Yukio
AU - Teranishi, Ryo
AU - Kaneko, Kenji
N1 - Funding Information:
This work was supported by JSPS KAKENHI (Grant Numbers JP18H01710 and JP18K18952), by the JSPS-DST bilateral joint research program, and by JST CREST, Japan (Grant Number JPMJCR18R2). Experiments were conducted at the Ultramicroscopy Center, Kyushu University. The authors would like to thank Tiffany Jain, M.S., from Edanz Group ( www.edanzediting.com/ac ) for editing a draft of this manuscript.
Funding Information:
This work was supported by JSPS KAKENHI (Grant Numbers JP18H01710 and JP18K18952), by the JSPS-DST bilateral joint research program, and by JST CREST, Japan (Grant Number JPMJCR18R2). Experiments were conducted at the Ultramicroscopy Center, Kyushu University. The authors would like to thank Tiffany Jain, M.S., from Edanz Group (www.edanzediting.com/ac) for editing a draft of this manuscript.
Publisher Copyright:
© 2020, Springer Science+Business Media, LLC, part of Springer Nature.
PY - 2020/7/1
Y1 - 2020/7/1
N2 - Atomic-scale scanning transmission electron microscopy (STEM) imaging has opened up the possibility of studying the local lattice parameters of crystalline materials. To ensure more accurate measurements, low-frequency distortions of the images should be properly calibrated, which requires a better understanding of their causes. Although the major possible causes are sample drift and the scanning systems of microscopes, their effects are intricate because the rates of sample drifts differ in respective measurements. In the present study, low-frequency distortions of STEM images and their dependence on scan rotations were evaluated by measuring the lattice parameters of a reference specimen, strontium titanate. The distortions due to sample drifts and the scanning system of a microscope were separately calculated and corrected using affine transformations. In the as-observed images, the length scales in the x and y directions were underestimated by 0.4–1.2% and 2.7–3.6%, respectively, with shear distortions of 0.6°–1.2°, and the magnitudes of the underestimation and shear distortions were dependent on the scan rotations. On the basis of these findings, a methodology was proposed for the correction of distortions for accurate measurement of the lattice parameters of materials.
AB - Atomic-scale scanning transmission electron microscopy (STEM) imaging has opened up the possibility of studying the local lattice parameters of crystalline materials. To ensure more accurate measurements, low-frequency distortions of the images should be properly calibrated, which requires a better understanding of their causes. Although the major possible causes are sample drift and the scanning systems of microscopes, their effects are intricate because the rates of sample drifts differ in respective measurements. In the present study, low-frequency distortions of STEM images and their dependence on scan rotations were evaluated by measuring the lattice parameters of a reference specimen, strontium titanate. The distortions due to sample drifts and the scanning system of a microscope were separately calculated and corrected using affine transformations. In the as-observed images, the length scales in the x and y directions were underestimated by 0.4–1.2% and 2.7–3.6%, respectively, with shear distortions of 0.6°–1.2°, and the magnitudes of the underestimation and shear distortions were dependent on the scan rotations. On the basis of these findings, a methodology was proposed for the correction of distortions for accurate measurement of the lattice parameters of materials.
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U2 - 10.1007/s10853-020-04602-w
DO - 10.1007/s10853-020-04602-w
M3 - Article
AN - SCOPUS:85083266178
VL - 55
SP - 8123
EP - 8133
JO - Journal of Materials Science
JF - Journal of Materials Science
SN - 0022-2461
IS - 19
ER -