Unwoven fabric pads non-destructive conditioning by high pressure micro jet in CMP process

Keiji Miyachi, Syuhei Kurokawa, Toshiro Doi, Yoshiyuki Seike, Shinichi Izumikawa, Taro Akama, Osamu Ohnishi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Engineering & Materials Science