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Unwoven fabric pads non-destructive conditioning by high pressure micro jet in CMP process
Keiji Miyachi, Syuhei Kurokawa, Toshiro Doi, Yoshiyuki Seike, Shinichi Izumikawa, Taro Akama, Osamu Ohnishi
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)