UV-laser ablation spectroscopy in element analysis of solid surface

Yuji Oki; Takayuki Takao; Takumi Nomura; Mitsuo Maeda

doi:10.1007/s10043-998-0242-2

UV-laser ablation spectroscopy in element analysis of solid surface

Yuji Oki, Takayuki Takao, Takumi Nomura, Mitsuo Maeda

Department of I&E Visionaries

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Laser ablation for the atomic emission spectroscopy of a glass sample is studied using pulsed UV laser systems and the effect of the laser wavelength is investigated. The threshold fluence for ablation is decreased and the detection sensitivity is improved for shorter wavelengths. Furthermore, very thin (less than 1 nm/shot) surface slicing is possible at a wavelength as short as 193 nm. Polymers also show good ablation characteristics. Improvement of sensitivity and spatial resolution by using shorter wavelength laser ablation is discussed for Na detection in a glass sample.

Original language	English
Pages (from-to)	242-246
Number of pages	5
Journal	Optical Review
Volume	5
Issue number	4
DOIs	https://doi.org/10.1007/s10043-998-0242-2
Publication status	Published - Jan 1 1998

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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10.1007/s10043-998-0242-2

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title = "UV-laser ablation spectroscopy in element analysis of solid surface",

abstract = "Laser ablation for the atomic emission spectroscopy of a glass sample is studied using pulsed UV laser systems and the effect of the laser wavelength is investigated. The threshold fluence for ablation is decreased and the detection sensitivity is improved for shorter wavelengths. Furthermore, very thin (less than 1 nm/shot) surface slicing is possible at a wavelength as short as 193 nm. Polymers also show good ablation characteristics. Improvement of sensitivity and spatial resolution by using shorter wavelength laser ablation is discussed for Na detection in a glass sample.",

author = "Yuji Oki and Takayuki Takao and Takumi Nomura and Mitsuo Maeda",

year = "1998",

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doi = "10.1007/s10043-998-0242-2",

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T1 - UV-laser ablation spectroscopy in element analysis of solid surface

AU - Oki, Yuji

AU - Takao, Takayuki

AU - Nomura, Takumi

AU - Maeda, Mitsuo

PY - 1998/1/1

Y1 - 1998/1/1

N2 - Laser ablation for the atomic emission spectroscopy of a glass sample is studied using pulsed UV laser systems and the effect of the laser wavelength is investigated. The threshold fluence for ablation is decreased and the detection sensitivity is improved for shorter wavelengths. Furthermore, very thin (less than 1 nm/shot) surface slicing is possible at a wavelength as short as 193 nm. Polymers also show good ablation characteristics. Improvement of sensitivity and spatial resolution by using shorter wavelength laser ablation is discussed for Na detection in a glass sample.

AB - Laser ablation for the atomic emission spectroscopy of a glass sample is studied using pulsed UV laser systems and the effect of the laser wavelength is investigated. The threshold fluence for ablation is decreased and the detection sensitivity is improved for shorter wavelengths. Furthermore, very thin (less than 1 nm/shot) surface slicing is possible at a wavelength as short as 193 nm. Polymers also show good ablation characteristics. Improvement of sensitivity and spatial resolution by using shorter wavelength laser ablation is discussed for Na detection in a glass sample.

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SP - 242

EP - 246

JO - Optical Review

JF - Optical Review

IS - 4

ER -

UV-laser ablation spectroscopy in element analysis of solid surface

Abstract

All Science Journal Classification (ASJC) codes

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