Wavefront control system for phase compensation in hard X-ray optics

Takashi Kimura, Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Daisuke Yamakawa, Satoshi Matsuyama, Kouji Inagaki, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)


A highly precise adaptive optical system that can be used in the hard X-ray region was developed. To achieve highly precise control of the wavefront shape, we discussed an optical system with a bendable mirror of deformation accuracy better than 0.4nm RMS. Using the system, we demonstrated the controllability of the wavefront of a 15nm hard X-ray nanobeam. The intensity profile of the wavefrontmodified beam was in good agreement with the wave-optically calculated profile.

Original languageEnglish
Article number072503
JournalJapanese journal of applied physics
Issue number7 PART 1
Publication statusPublished - Jul 2009
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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