Wavy micro channels in micropatterned ceramic sheet formed by combined process of laser beam machining and imprinting

Fujio Tsumori, Simon Hunt, Kentaro Kudo, Toshiko Osada, Hideshi Miura

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Micro channels made of polymers are commonly used for MEMS and μTAS (micro-total analysis system) devices. In this research, we developed a process for fabricating a ceramic sheet with micro channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as sheet material. We employed laser machining to machine the sacrificial layer to form micro channels inside the sheet. We also employed imprinting, which is a process of pressing with a mould while heating, to form a structure with surface patterns and micro channels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and micro channels was obtained. As ceramics have high heat durability and low chemical reactivity, ceramic micro channels can be used for flow sensors or chemical reaction testers operated in harsh environments, such as high temperature or mechanical parts operated with reactive chemicals. In addition, by imprinting wavy patterns, the surface area can be increased. Therefore high efficiency heat exchangers can be built. Moreover, this method can be applied on SOFCs (solid oxide fuel cell) by fabricating YSZ (yttria stabilized zirconia) micro channels.

Original languageEnglish
Pages (from-to)511-518
Number of pages8
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume63
Issue number7
DOIs
Publication statusPublished - Jan 1 2016

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Laser beam machining
Polymers
Heating
Chemical reactivity
Yttria stabilized zirconia
Powder metallurgy
Solid oxide fuel cells (SOFC)
Powders
MEMS
Heat exchangers
Chemical reactions
Machining
Durability
Lasers
Sensors
Temperature

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Metals and Alloys
  • Materials Chemistry

Cite this

@article{0cda114484d144efaf7b1927e84e4dc9,
title = "Wavy micro channels in micropatterned ceramic sheet formed by combined process of laser beam machining and imprinting",
abstract = "Micro channels made of polymers are commonly used for MEMS and μTAS (micro-total analysis system) devices. In this research, we developed a process for fabricating a ceramic sheet with micro channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as sheet material. We employed laser machining to machine the sacrificial layer to form micro channels inside the sheet. We also employed imprinting, which is a process of pressing with a mould while heating, to form a structure with surface patterns and micro channels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and micro channels was obtained. As ceramics have high heat durability and low chemical reactivity, ceramic micro channels can be used for flow sensors or chemical reaction testers operated in harsh environments, such as high temperature or mechanical parts operated with reactive chemicals. In addition, by imprinting wavy patterns, the surface area can be increased. Therefore high efficiency heat exchangers can be built. Moreover, this method can be applied on SOFCs (solid oxide fuel cell) by fabricating YSZ (yttria stabilized zirconia) micro channels.",
author = "Fujio Tsumori and Simon Hunt and Kentaro Kudo and Toshiko Osada and Hideshi Miura",
year = "2016",
month = "1",
day = "1",
doi = "10.2497/jjspm.63.511",
language = "English",
volume = "63",
pages = "511--518",
journal = "Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy",
issn = "0532-8799",
publisher = "Japan Society of Powder and Powder Metallurgy",
number = "7",

}

TY - JOUR

T1 - Wavy micro channels in micropatterned ceramic sheet formed by combined process of laser beam machining and imprinting

AU - Tsumori, Fujio

AU - Hunt, Simon

AU - Kudo, Kentaro

AU - Osada, Toshiko

AU - Miura, Hideshi

PY - 2016/1/1

Y1 - 2016/1/1

N2 - Micro channels made of polymers are commonly used for MEMS and μTAS (micro-total analysis system) devices. In this research, we developed a process for fabricating a ceramic sheet with micro channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as sheet material. We employed laser machining to machine the sacrificial layer to form micro channels inside the sheet. We also employed imprinting, which is a process of pressing with a mould while heating, to form a structure with surface patterns and micro channels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and micro channels was obtained. As ceramics have high heat durability and low chemical reactivity, ceramic micro channels can be used for flow sensors or chemical reaction testers operated in harsh environments, such as high temperature or mechanical parts operated with reactive chemicals. In addition, by imprinting wavy patterns, the surface area can be increased. Therefore high efficiency heat exchangers can be built. Moreover, this method can be applied on SOFCs (solid oxide fuel cell) by fabricating YSZ (yttria stabilized zirconia) micro channels.

AB - Micro channels made of polymers are commonly used for MEMS and μTAS (micro-total analysis system) devices. In this research, we developed a process for fabricating a ceramic sheet with micro channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as sheet material. We employed laser machining to machine the sacrificial layer to form micro channels inside the sheet. We also employed imprinting, which is a process of pressing with a mould while heating, to form a structure with surface patterns and micro channels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and micro channels was obtained. As ceramics have high heat durability and low chemical reactivity, ceramic micro channels can be used for flow sensors or chemical reaction testers operated in harsh environments, such as high temperature or mechanical parts operated with reactive chemicals. In addition, by imprinting wavy patterns, the surface area can be increased. Therefore high efficiency heat exchangers can be built. Moreover, this method can be applied on SOFCs (solid oxide fuel cell) by fabricating YSZ (yttria stabilized zirconia) micro channels.

UR - http://www.scopus.com/inward/record.url?scp=84982786560&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84982786560&partnerID=8YFLogxK

U2 - 10.2497/jjspm.63.511

DO - 10.2497/jjspm.63.511

M3 - Article

VL - 63

SP - 511

EP - 518

JO - Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy

JF - Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy

SN - 0532-8799

IS - 7

ER -