Weakly copper-fullerenol layer on chemical mechanical polishing using water soluble fullerenol

Hirotaka Kishida, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - ASPE 2010 Annual Meeting
Pages293-296
Number of pages4
Volume50
Publication statusPublished - 2010
Externally publishedYes
Event25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 - Atlanta, GA, United States
Duration: Oct 31 2010Nov 4 2010

Other

Other25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010
CountryUnited States
CityAtlanta, GA
Period10/31/1011/4/10

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

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