Wet process-based fabrication of WO3 thin film for NO 2 detection

Yong Gyu Choi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

It was tried to fabricate a WO3 thin film device through a wet process starting from an aqueous sol of WO3·2H2O. When mixed with polyethylene glycol (PEG, molecular weight 6000), the sol was made compatible to spin coating on an alumina substrate and the coating could be converted into a WO3 thin film by calcination at 300°C for 2h. Starting with a typical coating dispersion containing WO 3·2H2O by 5mass% on WO3 basis and 2mass% PEG, the WO3 film obtained was 450nm in mean thickness. The film was a slim pack of square plates, each of which was a stack of thin lamellar crystals of WO3. The device was sensitive enough to detect 50ppb NO2 in air at 200 or 250°C, although the response and recovery transients were rather sluggish. Unexpectedly, the transients were found to be sharpened drastically in humid atmosphere, while sensor response (sensitivity) to NO2 was hardly degraded with humidity.

Original languageEnglish
Pages (from-to)107-111
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume101
Issue number1-2
DOIs
Publication statusPublished - Jun 15 2004

Fingerprint

Polymethyl Methacrylate
Polyethylene glycols
Sols
Thin film devices
coatings
Fabrication
Thin films
Coatings
fabrication
Aluminum Oxide
Spin coating
thin films
Calcination
roasting
coating
humidity
glycols
polyethylenes
molecular weight
Atmospheric humidity

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Wet process-based fabrication of WO3 thin film for NO 2 detection. / Choi, Yong Gyu; Sakai, Go; Shimanoe, Kengo; Yamazoe, Noboru.

In: Sensors and Actuators, B: Chemical, Vol. 101, No. 1-2, 15.06.2004, p. 107-111.

Research output: Contribution to journalArticle

Choi, Yong Gyu ; Sakai, Go ; Shimanoe, Kengo ; Yamazoe, Noboru. / Wet process-based fabrication of WO3 thin film for NO 2 detection. In: Sensors and Actuators, B: Chemical. 2004 ; Vol. 101, No. 1-2. pp. 107-111.
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