X-ray imaging test for a single-stage MEMS X-ray optical system

Ikuyuki Mitsuishi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama, Yoshitomo Maeda, Takayuki Hayashi, Takuro Sato, Makoto Mita, N. Y. Yamasaki, K. Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Taylor Boggs, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 ìm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.

Original languageEnglish
Title of host publication2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages151-152
Number of pages2
DOIs
Publication statusPublished - Dec 1 2010
Externally publishedYes
Event2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
Duration: Aug 9 2010Aug 12 2010

Publication series

Name2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Other

Other2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
CountryJapan
CitySapporo
Period8/9/108/12/10

Fingerprint

Optical systems
MEMS
Imaging techniques
X rays
Image quality
Surface roughness

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Mitsuishi, I., Ezoe, Y., Ishizu, K., Moriyama, T., Maeda, Y., Hayashi, T., ... Maeda, R. (2010). X-ray imaging test for a single-stage MEMS X-ray optical system. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 151-152). [5672138] (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672138

X-ray imaging test for a single-stage MEMS X-ray optical system. / Mitsuishi, Ikuyuki; Ezoe, Yuichiro; Ishizu, Kensuke; Moriyama, Teppei; Maeda, Yoshitomo; Hayashi, Takayuki; Sato, Takuro; Mita, Makoto; Yamasaki, N. Y.; Mitsuda, K.; Horade, Mitsuhiro; Sugiyama, Susumu; Riveros, Raul E.; Boggs, Taylor; Yamaguchi, Hitomi; Kanamori, Yoshiaki; Morishita, Kohei; Nakajima, Kazuo; Maeda, Ryutaro.

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 151-152 5672138 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mitsuishi, I, Ezoe, Y, Ishizu, K, Moriyama, T, Maeda, Y, Hayashi, T, Sato, T, Mita, M, Yamasaki, NY, Mitsuda, K, Horade, M, Sugiyama, S, Riveros, RE, Boggs, T, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K & Maeda, R 2010, X-ray imaging test for a single-stage MEMS X-ray optical system. in 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672138, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, pp. 151-152, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, Japan, 8/9/10. https://doi.org/10.1109/OMEMS.2010.5672138
Mitsuishi I, Ezoe Y, Ishizu K, Moriyama T, Maeda Y, Hayashi T et al. X-ray imaging test for a single-stage MEMS X-ray optical system. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 151-152. 5672138. (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672138
Mitsuishi, Ikuyuki ; Ezoe, Yuichiro ; Ishizu, Kensuke ; Moriyama, Teppei ; Maeda, Yoshitomo ; Hayashi, Takayuki ; Sato, Takuro ; Mita, Makoto ; Yamasaki, N. Y. ; Mitsuda, K. ; Horade, Mitsuhiro ; Sugiyama, Susumu ; Riveros, Raul E. ; Boggs, Taylor ; Yamaguchi, Hitomi ; Kanamori, Yoshiaki ; Morishita, Kohei ; Nakajima, Kazuo ; Maeda, Ryutaro. / X-ray imaging test for a single-stage MEMS X-ray optical system. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. pp. 151-152 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).
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AU - Maeda, Yoshitomo

AU - Hayashi, Takayuki

AU - Sato, Takuro

AU - Mita, Makoto

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