X-ray irradiation test of a MEMS-based X-ray optic

Tomohiro Ogawa, Yuichiro Ezoe, Takuya Kakiuchi, Masahiro Ikuta, Mayu Sato, Takaya Ohashi, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Kohei Morishita, Kazuo Nakajima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic. The angular resolution and effective area were 4.1 arcmin and 32 mm2 both of which are 3 and 40 times better than those in the first test.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages131-132
Number of pages2
ISBN (Electronic)9780992841423
DOIs
Publication statusPublished - Oct 14 2014
Externally publishedYes
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: Aug 17 2014Aug 21 2014

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period8/17/148/21/14

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Ogawa, T., Ezoe, Y., Kakiuchi, T., Ikuta, M., Sato, M., Ohashi, T., Mitsuishi, I., Mitsuda, K., Morishita, K., & Nakajima, K. (2014). X-ray irradiation test of a MEMS-based X-ray optic. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 131-132). [6924555] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924555