Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering