YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering

Yoshitaka Nakamura, Yuta Isozaki, Masashi Miura, Tomohiro Kuroiwa, Yutaka Yoshida, Kaname Matsumoto, Ataru Ichinose, Shigeru Horii, Masashi Mukaida, Shigetoshi Ohshima

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

Original languageEnglish
Pages (from-to)3028-3030
Number of pages3
JournalIEEE Transactions on Applied Superconductivity
Volume15
Issue number2 PART III
DOIs
Publication statusPublished - Jun 2005
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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