YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering

Yoshitaka Nakamura; Yuta Isozaki; Masashi Miura; Tomohiro Kuroiwa; Yutaka Yoshida; Kaname Matsumoto; Ataru Ichinose; Shigeru Horii; Masashi Mukaida; Shigetoshi Ohshima

doi:10.1109/TASC.2005.848711

YBCO thin films on TiO ₂ buffer layer deposited by RF magnetron sputtering

Yoshitaka Nakamura, Yuta Isozaki, Masashi Miura, Tomohiro Kuroiwa, Yutaka Yoshida, Kaname Matsumoto, Ataru Ichinose, Shigeru Horii, Masashi Mukaida, Shigetoshi Ohshima

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Rutile structure TiO ₂ buffer layers and YBa ₂Cu ₃O _7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO ₂ buffer layers. The crystal structure of TiO ₂ thin films changed from (100) oriented anatase structure TiO ₂ to (110) oriented rutile structure TiO ₂ with increasing substrate temperature. The (110) oriented rutile structure TiO ₂ thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO ₂ buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

Original language	English
Pages (from-to)	3028-3030
Number of pages	3
Journal	IEEE Transactions on Applied Superconductivity
Volume	15
Issue number	2 PART III
DOIs	https://doi.org/10.1109/TASC.2005.848711
Publication status	Published - Jun 2005
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/TASC.2005.848711

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title = "YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering",

abstract = "Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.",

author = "Yoshitaka Nakamura and Yuta Isozaki and Masashi Miura and Tomohiro Kuroiwa and Yutaka Yoshida and Kaname Matsumoto and Ataru Ichinose and Shigeru Horii and Masashi Mukaida and Shigetoshi Ohshima",

year = "2005",

month = jun,

doi = "10.1109/TASC.2005.848711",

language = "English",

volume = "15",

pages = "3028--3030",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2 PART III",

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T1 - YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering

AU - Nakamura, Yoshitaka

AU - Isozaki, Yuta

AU - Miura, Masashi

AU - Kuroiwa, Tomohiro

AU - Yoshida, Yutaka

AU - Matsumoto, Kaname

AU - Ichinose, Ataru

AU - Horii, Shigeru

AU - Mukaida, Masashi

AU - Ohshima, Shigetoshi

PY - 2005/6

Y1 - 2005/6

N2 - Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

AB - Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

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DO - 10.1109/TASC.2005.848711

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SP - 3028

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JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2 PART III

ER -

YBCO thin films on TiO ₂ buffer layer deposited by RF magnetron sputtering

Abstract

All Science Journal Classification (ASJC) codes

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