ギガフォトンNext GLP共同研究部門

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Laser beam effects Engineering & Materials Science
Excimer lasers Engineering & Materials Science
Annealing Engineering & Materials Science
Lasers Engineering & Materials Science
Doping (additives) Engineering & Materials Science
laser annealing Physics & Astronomy
excimer lasers Physics & Astronomy
irradiation Physics & Astronomy

ネットワーク 最近の共同研究。丸をクリックして詳細を確認しましょう。

研究成果 2012 2019

Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping

Okamoto, K., Kikuchi, T., Ikeda, A., Ikenoue, H. & Asano, T., 1 1 2019, PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. Ribeiro, P., Raposo, M. & Andrews, D. (版). SciTePress, p. 294-298 5 p. (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology).

研究成果: 著書/レポートタイプへの貢献会議での発言

low resistance
lasers
electric contacts
contact resistance
excimer lasers

Formation of low resistivity layers on singlecrystalline diamond by excimer laser irradiation

Abubakr, E., Zkria, A., Katamune, Y., Ohmagari, S., Imokawa, K., Ikenoue, H. & Yoshitake, T., 5 1 2019, : : Diamond and Related Materials. 95, p. 166-173 8 p.

研究成果: ジャーナルへの寄稿記事

Diamond
Excimer lasers
Laser beam effects
excimer lasers
Diamonds

Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition

Paneerselvam, E., Lakshmi Narayanan, V. K., Vasa, N. J., Higashihata, M., Nakamura, D., Ikenoue, H. & Ramachandra Rao, M. S., 6 15 2019, : : Journal of Electronic Materials. 48, 6, p. 3468-3478 11 p.

研究成果: ジャーナルへの寄稿記事

Pulsed laser deposition
Silicon carbide
silicon carbides
pulsed laser deposition
Doping (additives)