研究成果 1980 2020

フィルター
2000

Oxynitridation of Si with nitrogen plasma for flash memory and its high frequency C-V characteristics

Ikeda, A., Elnaby, M. A., Fujimura, T., Hattori, R. & Kuroki, Y., 12 1 2000, Advances in Physics, Electronics and Signal Processing Applications. World Scientific and Engineering Academy and Society, p. 178-182 5 p.

研究成果: 著書/レポートタイプへの貢献

Nitrogen plasma
Flash memory
Plasmas
Oxidation
Nitridation