研究成果 1980 2020

フィルター
記事
1997
3 引用 (Scopus)

Reduction of charge build-up during reactive ion etching by using silicon-on-insulator structures

Arita, K., Akamatsu, M. & Asano, T., 3 1 1997, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 36, 3 SUPPL. B, p. 1505-1508 4 p.

研究成果: ジャーナルへの寄稿記事

Reactive ion etching
insulators
etching
Silicon
silicon
10 引用 (Scopus)

Single-crystal Si field emitter fabricated by anodization

Higa, K., Nishii, K. & Asano, T., 8 18 1997, : : Applied Physics Letters. 71, 7, p. 983-985 3 p.

研究成果: ジャーナルへの寄稿記事

crystal field theory
emitters
p-n junctions
single crystals
fabrication
1998
29 引用 (Scopus)

40Gbit/s optical receiver module using a flip-chip bonding technique for device interconnection

Miyamoto, Y., Yoneyama, M., Imai, Y., Kato, K. & Tsunetsugu, H., 3 5 1998, : : Electronics Letters. 34, 5, p. 493-494 2 p.

研究成果: ジャーナルへの寄稿記事

Optical receivers
Photodiodes
Waveguides
17 引用 (Scopus)

46.5-GHz-bandwidth monolithic receiver OEIC consisting of a waveguide p-i-n photodiode and a HEMT distributed amplifier

Takahata, K., Muramoto, Y., Fukano, H., Kato, K., Kozen, A., Nakajima, O. & Matsuoka, Y., 8 1 1998, : : IEEE Photonics Technology Letters. 10, 8, p. 1150-1152 3 p.

研究成果: ジャーナルへの寄稿記事

transistor amplifiers
distributed amplifiers
Integrated optoelectronics
High electron mobility transistors
Photodiodes
2 引用 (Scopus)

Enhanced degradation of gate oxide in negative-gas plasma during reactive ion etching

Arita, K., Takihara, H. & Asano, T., 3 1 1998, : : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 16, 2, p. 670-673 4 p.

研究成果: ジャーナルへの寄稿記事

Plasma etching
Reactive ion etching
etching
degradation
Plasmas

GaAs MESFET distributed baseband amplifier IC with allpass filter network

Kimura, S., Imai, Y., Kikuchi, H. & Tokumitsu, M., 10 29 1998, : : Electronics Letters. 34, 22, p. 2124-2126 3 p.

研究成果: ジャーナルへの寄稿記事

Television networks
Integrated circuits
Networks (circuits)
Group delay
Electric lines
9 引用 (Scopus)

Gated Si field emitter array prepared by using anodization

Higa, K., Nishii, K. & Asano, T., 3 1 1998, : : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 16, 2, p. 651-653 3 p.

研究成果: ジャーナルへの寄稿記事

emitters
Silicon
Porous silicon
Silicon wafers
Field emission
17 引用 (Scopus)

Growth behavior of boron-doped diamond in microwave plasma-assisted chemical vapor deposition using trimethylboron as the dopant source

Maeda, H., Ohtsubo, K., Kameta, M., Saito, T., Kusakabe, K., Morooka, S. & Asano, T., 1 1998, : : Diamond and Related Materials. 7, 1, p. 88-95 8 p.

研究成果: ジャーナルへの寄稿記事

Diamond
Boron
Chemical vapor deposition
Diamonds
Microwaves
38 引用 (Scopus)

High-output-voltage, high speed, high efficiency uni-travelling-carrier waveguide photodiode

Muramoto, Y., Kato, K., Mitsuhara, M., Nakajima, O., Matsuoka, Y., Shimizu, N. & Ishibashi, T., 1 8 1998, : : Electronics Letters. 34, 1, p. 122-123 2 p.

研究成果: ジャーナルへの寄稿記事

Photodiodes
Waveguides
Bandwidth
Electric potential
Quantum efficiency
18 引用 (Scopus)

Hybrid integrated four-channel SS-SOA array module using planar lightwave circuit platform

Ogawa, I., Ebisawa, F., Hanawa, F., Hashimoto, T., Yanagisawa, M., Shuto, K., Ohyama, T., Yamada, Y., Akahori, Y., Himeno, A., Kato, K., Yoshimoto, N. & Tohmori, Y., 2 19 1998, : : Electronics Letters. 34, 4, p. 361-363 3 p.

研究成果: ジャーナルへの寄稿記事

Service oriented architecture (SOA)
Light amplifiers
Networks (circuits)
6 引用 (Scopus)

Morphology and semiconducting properties of homoepitaxially grown phosphorus-doped (1 0 0) and (1 1 1) diamond films by microwave plasma-assisted chemical vapor deposition using triethylphosphine as a dopant source

Saito, T., Kameta, M., Kusakabe, K., Morooka, S., Maeda, H., Hayashi, Y., Asano, T. & Kawahara, A., 8 1 1998, : : Journal of Crystal Growth. 191, 4, p. 723-733 11 p.

研究成果: ジャーナルへの寄稿記事

Diamond films
diamond films
Phosphorus
phosphorus
Chemical vapor deposition
42 引用 (Scopus)

Reduction of the floating body effect in SOI MOSFETs by using Schottky source/drain contacts

Nishisaka, M. & Asano, T., 3 1 1998, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 37, 3 SUPPL. B, p. 1295-1299 5 p.

研究成果: ジャーナルへの寄稿記事

SOI (semiconductors)
MOSFET devices
metal oxide semiconductors
floating
electric contacts
1 引用 (Scopus)

Suppressing plasma induced degradation of gate oxide using silicon-on-insulator structures

Arita, K., Akamatsu, M. & Asano, T., 3 1 1998, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 37, 3 SUPPL. B, p. 1278-1281 4 p.

研究成果: ジャーナルへの寄稿記事

Silicon oxides
silicon oxides
insulators
degradation
Plasmas
23 引用 (Scopus)

Synthesis and electrical properties of phosphorus-doped homoepitaxial diamond (111) by microwave plasma-assisted chemical vapor deposition using triethylphosphine as a dopant source

Saito, T., Kameta, M., Kusakabe, K., Morooka, S., Maeda, H., Hayashi, Y. & Asano, T., 5 1 1998, : : Japanese Journal of Applied Physics, Part 2: Letters. 37, 5 PART A, p. L543-L546

研究成果: ジャーナルへの寄稿記事

Diamond films
diamond films
phosphorus
Phosphorus
Chemical vapor deposition
3 引用 (Scopus)

Synthesis of phosphorus-doped homoepitaxial diamond by microwave plasma-assisted chemical vapor deposition using triethylphosphine as the dopant

Saito, T., Kameta, M., Kusakabe, K., Morooka, S., Maeda, H. & Asano, T., 2 1 1998, : : Diamond and Related Materials. 7, 2-5, p. 560-564 5 p.

研究成果: ジャーナルへの寄稿記事

Diamond
Diamond films
Phosphorus
Chemical vapor deposition
Diamonds
2 引用 (Scopus)

Visualization of plasma uniformity in dry etching using the imaging plate

Arita, K., Etoh, M. & Asano, T., 3 1 1998, : : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 16, 2, p. 519-522 4 p.

研究成果: ジャーナルへの寄稿記事

Dry etching
Visualization
etching
Plasmas
Imaging techniques
1999
12 引用 (Scopus)

1.3/1.55-μm full-duplex WDM optical transceiver modules for ATM-PON (PDS) systems using PLC-'CMOS-IC technologies

Kurosakl, T., Hashimotq, T., Ishihara, N., Suzukl, Y., Yanagisawa, M., Kimura, H., Nakamura, M., Tohmor, Y., Katq, K., Kawaguchl, Y., Akahorl, Y., Yamada, Y., Katq, K., Toba, H. & Yoshida, J., 1 1 1999, : : IEICE Transactions on Electronics. E82-C, 8, p. 1465-1472 8 p.

研究成果: ジャーナルへの寄稿記事

Optical transceivers
Automatic teller machines
Programmable logic controllers
Wavelength division multiplexing
Crosstalk
1 引用 (Scopus)

A new merged bipolar-MOS transistor in a silicon on insulator structure

Zheng, Y. S. & Asano, T., 12 1 1999, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 38, 4 B, p. 2501-2505 5 p.

研究成果: ジャーナルへの寄稿記事

silicon transistors
Silicon oxides
metal oxides
Transistors
Bipolar transistors
1 引用 (Scopus)

Coplanar quarter-wavelength resonator filters fabricated by the superconducting sol-gel films

Kanaya, H., Senoh, H., Kaneyuki, T. & Awai, I., 12 1 1999, : : IEEE Transactions on Applied Superconductivity. 9, 2 PART 3, p. 3913-3916 4 p.

研究成果: ジャーナルへの寄稿記事

Sol-gels
Resonators
resonators
gels
filters
6 引用 (Scopus)

Electrical properties of homoepitaxial boron-doped diamond thin films grown by chemical vapor deposition using trimethylboron as dopant

Morooka, S., Fukui, T., Semoto, K., Tsubota, T., Saito, T., Kusakabe, K., Maeda, H., Hayashi, Y. & Asano, T., 1 1 1999, : : Diamond and Related Materials. 8, 1, p. 42-47 6 p.

研究成果: ジャーナルへの寄稿記事

Hall mobility
Diamond
Boron
Diamond films
Chemical vapor deposition
1 引用 (Scopus)

Low-cost, high-speed and high-responsivity photodiode module employing edge-illuminated refracting-facet photodiode

Fukano, H., Kato, K., Nakajima, O. & Matsuoka, Y., 5 13 1999, : : Electronics Letters. 35, 10, p. 842-843 2 p.

研究成果: ジャーナルへの寄稿記事

Photodiodes
Costs
Bandwidth
Fabrication
2000
25 引用 (Scopus)

Dehydration after plasma oxidation of porous low-dielectric-constant spin-on-glass films

Kondoh, E., Asano, T., Arao, H., Nakashima, A. & Komatsu, M., 12 1 2000, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 39, 7 A, p. 3919-3923 5 p.

研究成果: ジャーナルへの寄稿記事

Dehydration
dehydration
Permittivity
permittivity
Plasmas
77 引用 (Scopus)

Effect of oxygen plasma exposure of porous spin-on-glass films

Kondoh, E., Asano, T., Nakashima, A. & Komatu, M., 5 1 2000, : : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18, 3, p. 1276-1280 5 p.

研究成果: ジャーナルへの寄稿記事

oxygen plasma
Plasmas
Glass
Oxidation
oxidation

High-performance flip-chip technique with an optimized coplanar waveguide

Iwasaki, N., Ishitsuka, F., Tsunetsugu, H. & Kato, K., 9 2000, : : Unknown Journal. 10, 5, p. 289-295 7 p.

研究成果: ジャーナルへの寄稿記事

Coplanar waveguides
electromagnetic field
design method
Turnaround time
Millimeter waves
10 引用 (Scopus)
Silicon oxides
Lithography
metal oxides
lithography
Molds
3 引用 (Scopus)

Microfluidic oscillator using vapor bubble on thin film heater

Takahashi, K., Nagayama, K. & Asano, T., 2000, : : Unknown Journal. p. 419-423 5 p.

研究成果: ジャーナルへの寄稿記事

Microfluidics
bubble
Actuators
Vapors
Thin films
20 引用 (Scopus)

Ultrafast monolithic receiver OEIC composed of multimode waveguide p-i-n photodiode and HEMT distributed amplifier

Takahata, K., Muramoto, Y., Fukano, H., Kato, K., Kozen, A., Kimura, S., Imai, Y., Miyamoto, Y., Nakajima, O. & Matsuoka, Y., 1 1 2000, : : IEEE Journal on Selected Topics in Quantum Electronics. 6, 1, p. 31-37 7 p.

研究成果: ジャーナルへの寄稿記事

transistor amplifiers
distributed amplifiers
Integrated optoelectronics
High electron mobility transistors
Photodiodes
2001
13 引用 (Scopus)

Dynamic strain and chip damage during ultrasonic flip chip bonding

Hizukuri, M., Watanabe, N. & Asano, T., 4 1 2001, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 40, 4 B, p. 3044-3048 5 p.

研究成果: ジャーナルへの寄稿記事

ultrasonics
Ultrasonics
chips
damage
strain gages
14 引用 (Scopus)

Effect of nitrogen plasma conditions on electrical properties of silicon oxynitrided thin films for flash memory applications

Ikeda, A., Abd Elnaby, M., Hattori, R. & Kuroki, Y., 5 1 2001, : : Thin Solid Films. 386, 1, p. 111-116 6 p.

研究成果: ジャーナルへの寄稿記事

Nitrogen plasma
nitrogen plasma
Flash memory
oxynitrides
Silicon
6 引用 (Scopus)

Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation

Fujimura, T., Kuroki, Y., Hisakado, T., Ikeda, A., Hattori, R., Hakiai, Y., Hidaka, M., Choi, J. Y. & Chang, S. S., 2 1 2001, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 40, 2 A, p. 916-917 2 p.

研究成果: ジャーナルへの寄稿記事

Ablation
Synchrotron radiation
ablation
synchrotron radiation
Irradiation
1 引用 (Scopus)

Floating-gate enhanced current-amplification in bipolar action of SOI-MOSFET

Uryu, Y. & Asano, T., 10 11 2001, : : Electronics Letters. 37, 21, p. 1313-1314 2 p.

研究成果: ジャーナルへの寄稿記事

MOSFET devices
Amplification
Silicon on insulator technology
Silicon
Metals

Monitoring of two-dimensional plasma uniformity with electrostatic probing of oxidized wafer surface

Yasaka, M., Kitamura, T., Takeshita, M. & Asano, T., 4 1 2001, : : Japanese Journal of Applied Physics, Part 2: Letters. 40, 4 A

研究成果: ジャーナルへの寄稿記事

Electrostatics
wafers
electrostatics
Plasmas
Monitoring
8 引用 (Scopus)

Oxynitridation of silicon with nitrogen plasma for flash memory applications characterized by high frequency capacitance-voltage measurements

Ikeda, A., Abd Elnaby, M., Fujimura, T., Hattori, R. & Kuroki, Y., 4 2 2001, : : Thin Solid Films. 385, 1-2, p. 215-219 5 p.

研究成果: ジャーナルへの寄稿記事

Nitrogen plasma
Capacitance measurement
nitrogen plasma
Flash memory
Voltage measurement
5 引用 (Scopus)

SOI-MOSFET/diode composite photodetection device

Uryu, Y. & Asano, T., 4 1 2001, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 40, 4 B, p. 2897-2902 6 p.

研究成果: ジャーナルへの寄稿記事

SOI (semiconductors)
MOSFET devices
metal oxide semiconductors
Diodes
field effect transistors
2002

Design and performance of high gain superconducting booster circuit for LiNbO3 optical modulator

Yoshida, K., Mukaiyama, Y., Kanaya, H. & Kanda, Y., 8 1 2002, : : Physica C: Superconductivity and its applications. 372-376, PART 1, p. 360-363 4 p.

研究成果: ジャーナルへの寄稿記事

boosters
Light modulators
high gain
modulators
voltage amplifiers
3 引用 (Scopus)

Design and performance of miniaturized HTS coplanar waveguide bandpass filters with highly packed meanderlines

Kanaya, H., Koga, Y., Shinto, T. & Yoshida, K., 3 2002, : : IEICE Transactions on Electronics. E85-C, 3, p. 708-713 6 p.

研究成果: ジャーナルへの寄稿記事

Waveguide filters
Coplanar waveguides
Bandpass filters
Electromagnetic fields
Poles
1 引用 (Scopus)

Easy release of mold in imprint lithography using ion-beam-irradiated photoresist surface

Baba, A., Iwamoto, M., Tsubaki, K. & Asano, T., 6 1 2002, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 41, 6 B, p. 4190-4193 4 p.

研究成果: ジャーナルへの寄稿記事

Ion beam lithography
Photoresists
photoresists
lithography
ion beams
5 引用 (Scopus)

Fabrication of single-crystal silicon field emitter array on glass substrate

Higa, K. & Asano, T., 6 1 2002, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 41, 6 B, p. 4307-4310 4 p.

研究成果: ジャーナルへの寄稿記事

emitters
Joule heating
Single crystals
Fabrication
Glass
12 引用 (Scopus)
MOSFET devices
metal oxide semiconductors
field effect transistors
transconductance
Transconductance
5 引用 (Scopus)

Inter-particle interaction and thermal stability of ultra-fine Ba ferrite particles for high-density recording

Suzuki, T. & Tanaka, T., 4 1 2002, : : Journal of Magnetism and Magnetic Materials. 242-245, PART I, p. 328-330 3 p.

研究成果: ジャーナルへの寄稿記事

Particle interactions
particle interactions
Powders
Ferrite
ferrites
2 引用 (Scopus)

Superconducting small antenna combined with a bandpass filter

Yoshida, K., Mori, A. & Kanaya, H., 8 1 2002, : : Physica C: Superconductivity and its applications. 372-376, PART 1, p. 364-367 4 p.

研究成果: ジャーナルへの寄稿記事

slot antennas
Slot antennas
Bandpass filters
bandpass filters
antennas
2003

A study of thick PMMA film etching by the method of combined deep x-ray lithography and thermal development

Fujimura, T., Kuroki, Y., Ikeda, A., Etoh, S. I., Hattori, R., Hidaka, M. & Chang, S. S., 9 1 2003, : : Research Reports on Information Science and Electrical Engineering of Kyushu University. 8, 2, p. 141-146 6 p.

研究成果: ジャーナルへの寄稿記事

Synchrotron radiation
Thick films
Lithography
Etching
X rays
16 引用 (Scopus)
strain measurement
Strain measurement
ultrasonics
Ultrasonics
chips
11 引用 (Scopus)

CMOS application of single-grain thin film transistor produced using metal imprint technology

Makihira, K., Yoshii, M. & Asano, T., 4 1 2003, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 42, 4 B, p. 1983-1987 5 p.

研究成果: ジャーナルへの寄稿記事

Thin film transistors
CMOS
transistors
thin films
Metals
6 引用 (Scopus)

Complementary exposure of 70 nm SoC devices in electron projection lithography

Yamashita, H., Amemiya, I., Takeuchi, K., Masaoka, H., Takahashi, K., Ikeda, A., Kuroki, Y. & Yamabe, M., 11 1 2003, : : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 6, p. 2645-2649 5 p.

研究成果: ジャーナルへの寄稿記事

systems-on-a-chip
Lithography
Masks
masks
lithography
18 引用 (Scopus)

Design of HTS coplanar waveguide matching circuit for low noise CMOS-HTS receiver

Kanaya, H., Koga, Y., Urakawa, G. & Yoshida, K., 6 2003, : : IEEE Transactions on Applied Superconductivity. 13, 2, p. 1031-1034 4 p.

研究成果: ジャーナルへの寄稿記事

slot antennas
Slot antennas
Coplanar waveguides
low noise
inverters
32 引用 (Scopus)
Nitrogen plasma
nitrogen plasma
oxynitrides
Inductively coupled plasma
Silicon
11 引用 (Scopus)

Fabrication of open-top microchannel plate using deep X-ray exposure mask made with silicon on insulator substrate

Fujimura, T., Ikeda, A., Etoh, S. I., Hattori, R., Kuroki, Y. & Chang, S. S., 6 2003, : : Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. 42, 6 B, p. 4102-4106 5 p.

研究成果: ジャーナルへの寄稿記事

microchannel plates
Microchannels
high aspect ratio
Aspect ratio
Masks
7 引用 (Scopus)

Field emission from metal particles bound with a photoresist

Baba, A. & Asano, T., 1 1 2003, : : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 1 SPEC., p. 552-556 5 p.

研究成果: ジャーナルへの寄稿記事

metal particles
Photoresists
photoresists
Field emission
field emission
1 引用 (Scopus)
Thin film transistors
positioning
transistors
Silicon
solid phases