研究成果 1980 2020

フィルター
Conference article
2005

Foreseeing and active-suppression of anomalous discharge in plasma processing equipment by in-situ monitoring of plasma state using viewing port probe

Yasaka, M., Takeshita, M., Tama, M., Kitamura, T., Ito, N., Itagaki, Y., Uesugi, F., Okamura, K., Kodama, A., Miyagawa, R., Ishimatsu, K., Hagiwara, M. & Asano, T., 12 15 2005, : : IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. p. 371-374 4 p., PC207.

研究成果: ジャーナルへの寄稿Conference article

Plasma applications
Plasmas
Monitoring
Chucks
Reactive ion etching

Low temperature bonding of LiNbO3 waveguide chips to Si substrates in air

Takigawa, R., Higurashi, E., Suga, T., Shinada, S. & Kawanishi, T., 12 1 2005, : : Proceedings of SPIE - The International Society for Optical Engineering. 6050, 605012.

研究成果: ジャーナルへの寄稿Conference article

Silicon
Waveguide
Waveguides
Chip
chips
2004

Location control of crystal grains in excimer laser crystallization of silicon thin films for single-grain TFTs

Kumomi, H., Wakiyama, H., Nakagawa, G., Makihira, K. & Asano, T., 12 1 2004, : : Materials Research Society Symposium Proceedings. 808, p. 277-282 6 p.

研究成果: ジャーナルへの寄稿Conference article

Excimer lasers
Silicon
Crystallization
silicon
crystallization
2 引用 (Scopus)

Single-grain TFTs on location-controlled crystal grains formed by excimer laser crystallization of Si thin films

Kumomi, H., Shin, C., Nakagawa, G. & Asano, T., 12 1 2004, : : Technical Digest - International Electron Devices Meeting, IEDM. p. 773-776 4 p.

研究成果: ジャーナルへの寄稿Conference article

Excimer lasers
crystallization
Crystallization
laser
crystal
2003
9 引用 (Scopus)

Design and performance of superconducting circuits for LiNbO3 optical modulator and switch

Yoshida, K., Kanda, Y., Yoshihara, H., Kanaya, H., Shinkai, S. & Ishitobi, M., 6 1 2003, : : IEEE Transactions on Applied Superconductivity. 13, 2 I, p. 1027-1030 4 p.

研究成果: ジャーナルへの寄稿Conference article

Optical switches
Light modulators
modulators
switches
voltage amplifiers
20 引用 (Scopus)

Design method of miniaturized HTS coplanar waveguide bandpass filters using cross coupling

Kanaya, H., Fujiyama, J., Oba, R. & Yoshida, K., 6 1 2003, : : IEEE Transactions on Applied Superconductivity. 13, 2 I, p. 265-268 4 p.

研究成果: ジャーナルへの寄稿Conference article

Waveguide filters
Coplanar waveguides
cross coupling
Bandpass filters
bandpass filters
2001
5 引用 (Scopus)

Broadband and low driving-voltage LiNbO3 optical modulator with high Tc superconducting transmission line

Yoshida, K., Takeuchi, H., Kanaya, H., Kanda, Y., Uchiyama, T. & Wang, Z., 3 1 2001, : : IEEE Transactions on Applied Superconductivity. 11, 1 I, p. 442-445 4 p.

研究成果: ジャーナルへの寄稿Conference article

Light modulators
low voltage
transmission lines
modulators
Electric lines
2 引用 (Scopus)

Field electron emission from nano-pillarets prepared by RIE of organic materials

Baba, A. & Asano, T., 12 1 2001, : : SID Conference Record of the International Display Research Conference. p. 1185-1188 4 p.

研究成果: ジャーナルへの寄稿Conference article

etching
Electron emission
Reactive ion etching
Photoresists
electron
7 引用 (Scopus)

Inductively coupled plasma application to the resist ashing

Takagi, K. I., Ikeda, A., Fujimura, T. & Kuroki, Y., 5 15 2001, : : Thin Solid Films. 386, 2, p. 160-164 5 p.

研究成果: ジャーナルへの寄稿Conference article

Plasma applications
Inductively coupled plasma
Plasmas
Charged particles
Magnetic field measurement
33 引用 (Scopus)

Miniaturized HTS coplanar waveguide bandpass filters with highly packed meanderlines

Kanaya, H., Shinto, T., Yoshida, K., Uchiyama, T. & Wang, Z., 3 1 2001, : : IEEE Transactions on Applied Superconductivity. 11, 1 I, p. 481-484 4 p.

研究成果: ジャーナルへの寄稿Conference article

Waveguide filters
inverters
Coplanar waveguides
Bandpass filters
bandpass filters

Poly-Si TFT with Schottky source/drain

Nakagawa, G., Makihira, K., Nishisaka, M. & Asano, T., 12 1 2001, : : SID Conference Record of the International Display Research Conference. p. 443-446 4 p.

研究成果: ジャーナルへの寄稿Conference article

Drain current
Polysilicon
drain
Crystallization
Temperature
35 引用 (Scopus)

Superconducting slot antenna with broadband impedance matching circuit

Yoshida, K., Takahashi, T., Kanaya, H., Uchiyama, T. & Wang, Z., 3 1 2001, : : IEEE Transactions on Applied Superconductivity. 11, 1 I, p. 103-106 4 p.

研究成果: ジャーナルへの寄稿Conference article

slot antennas
Slot antennas
impedance matching
antennas
Antennas
2000
3 引用 (Scopus)

Design and performance of miniaturized HTS coplanar waveguide meanderline bandpass filters

Kanaya, H., Nakamura, T., Sintou, T., Yoshida, K., Uchiyama, T., Shimakage, H. & Wang, Z., 1 1 2000, : : Physica C: Superconductivity and its applications. 341-348 (IV), p. 2663-2664 2 p.

研究成果: ジャーナルへの寄稿Conference article

Waveguide filters
Coplanar waveguides
Bandpass filters
bandpass filters
waveguides
1999
1 引用 (Scopus)

Design and preparation of single-chip HTS coplanar waveguide bandpass filters

Kanaya, H., Nakamura, T., Sashiyama, K., Yoshida, K., Uchiyama, T., Shimakage, H. & Wang, Z., 11 1 1999, : : Superconductor Science and Technology. 12, 11, p. 978-980 3 p.

研究成果: ジャーナルへの寄稿Conference article

Waveguide filters
Coplanar waveguides
Bandpass filters
bandpass filters
chips
15 引用 (Scopus)

Electronic properties of MOS capacitor exposed to inductively coupled hydrogen plasma

Ikeda, A., Sadou, T., Nagashima, H., Kouno, K., Yoshikawa, N., Tshukamoto, K. & Kuroki, Y., 5 7 1999, : : Thin Solid Films. 345, 1, p. 172-177 6 p.

研究成果: ジャーナルへの寄稿Conference article

MOS capacitors
hydrogen plasma
Electronic properties
Hydrogen
capacitors
1998
11 引用 (Scopus)

Full duplex 1.3/1.55 μm wavelength division multiplexing optical module using a planar lightwave circuit platform

Hashimoto, T., Kurosaki, T., Yanagisawa, M., Akahori, Y., Inoue, Y., Tohmori, Y., Kato, K., Yamada, Y. & Kato, K., 1 1 1998, : : LEOS Summer Topical Meeting. p. 59-60 2 p.

研究成果: ジャーナルへの寄稿Conference article

duplex
wavelength division multiplexing
Crosstalk
crosstalk
Wavelength division multiplexing
3 引用 (Scopus)

High-output-voltage waveguide photodiode employing uni-traveling-carrier structure

Muramoto, Y., Kato, K., Mitsuhara, M., Nakajima, O., Matsuoka, Y., Shimizu, N. & Ishibashi, T., 12 1 1998, : : Conference Proceedings - International Conference on Indium Phosphide and Related Materials. p. 407-410 4 p.

研究成果: ジャーナルへの寄稿Conference article

Photodiodes
Waveguides
Electric potential
Bandwidth
Quantum efficiency
1997
4 引用 (Scopus)

46.5-GHz-bandwidth monolithic receiver OEIC consisting of a waveguide pin photodiode and a distributed amplifier

Muramoto, Y., Takahata, K., Fukano, H., Kato, K., Kozen, A., Nakajima, O. & Matsuoka, Y., 12 1 1997, : : IEE Conference Publication. 448 /5, p. 37-40 4 p.

研究成果: ジャーナルへの寄稿Conference article

Integrated optoelectronics
Photodiodes
Waveguides
Bandwidth
High electron mobility transistors
1 引用 (Scopus)

Waveguide photodiode

Kato, K., 12 1 1997, : : Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 1, p. 158-159 2 p.

研究成果: ジャーナルへの寄稿Conference article

Photodiodes
Waveguides
mushroom
Impurities
Quantum efficiency
1995
6 引用 (Scopus)

High-speed waveguide photodetectors

Kato, K. & Akatsu, Y., 1 1 1995, : : Conference Proceedings - International Conference on Indium Phosphide and Related Materials. p. 349-352 4 p.

研究成果: ジャーナルへの寄稿Conference article

Photodetectors
Photodiodes
photodiodes
photometers
Waveguides
1986
1 引用 (Scopus)

GaAs-MESFETS FABRICATED IN SOI LAYERS ON CRYSTALLINE Ca//x SR//1// minus //x F//2 INSULATOR FILMS.

Tsutsui, K., Asano, T., Ishiwara, H. & Furukawa, S., 12 1 1986, : : Technical Digest - International Electron Devices Meeting. p. 755-758 4 p.

研究成果: ジャーナルへの寄稿Conference article

insulators
Semiconductor materials
Crystalline materials
field effect transistors
disorders
1985

EPITAXIAL GROWTH OF ALKALINE EARTH FLUORIDE FILMS ON Si SUBSTRATES.

Ishiwara, H. & Asano, T., 1 1 1985, : : Electrochemical Society Extended Abstracts. 85-1, 1 p.

研究成果: ジャーナルへの寄稿Conference article

Epitaxial growth
Earth (planet)
Vacuum deposition
Lattice mismatch
Molecular beams
4 引用 (Scopus)

EPITAXIAL GROWTH OF ALKALINE EARTH FLUORIDE FILMS ON Si SUBSTRATES.

Ishiwara, H., Asano, T. & Kanemaru, S., 12 1 1985, : : Proceedings - The Electrochemical Society. 85-7, p. 285-295 11 p.

研究成果: ジャーナルへの寄稿Conference article

Epitaxial growth
Earth (planet)
Substrates
Single crystals
Crystal lattices
1982
20 引用 (Scopus)

EPITAXIAL GROWTH OF ELEMENTAL SEMICONDUCTOR FILMS ONTO SILICIDE/Si AND FLUORIDE/Si STRUCTURES.

Ishiwara, H., Asano, T. & Furukawa, S., 1 1 1982, : : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1, 2, p. 266-271 6 p.

研究成果: ジャーナルへの寄稿Conference article

Epitaxial growth
Semiconductor materials
fluorides
Epitaxial films
Rutherford backscattering spectroscopy