研究成果 1989 2020

フィルター
記事
2014
4 引用 (Scopus)

Approach to high efficient CMP for power device substrates

Kurokawa, S., Doi, T. K., Wang, C., Sano, Y., Aida, H., Oyama, K. & Takahashi, K., 1 1 2014, : : ECS Transactions. 60, 1, p. 641-646 6 p.

研究成果: ジャーナルへの寄稿記事

Diamonds
Substrates
Silicon carbide
Gallium nitride
Ultrashort pulses
7 引用 (Scopus)

Camera based precision measurement in improving measurement accuracy

Hazrat Ali, M., Kurokawa, S. & Uesugi, K., 1 1 2014, : : Measurement: Journal of the International Measurement Confederation. 49, 1, p. 138-147 10 p.

研究成果: ジャーナルへの寄稿記事

Camera
Cameras
cameras
Performance Measurement
Measurement System
1 引用 (Scopus)

Dependence of GaN removal rate of plasma chemical vaporization machining on mechanically introduced damage

Sano, Y., Doi, T. K., Kurokawa, S., Aida, H., Ohnishi, O., Uneda, M., Shiozawa, K., Okada, Y. & Yamauchi, K., 1 1 2014, : : Sensors and Materials. 26, 6, p. 429-434 6 p.

研究成果: ジャーナルへの寄稿記事

Gallium nitride
gallium nitrides
Vaporization
machining
Machining
10 引用 (Scopus)

Development of improved solid oxide fuel cell electrolyte sheet by microimprinting for layered material

Tsumori, F., Tanaka, Y., Xu, Y., Osada, T. & Miura, H., 1 1 2014, : : Japanese Journal of Applied Physics. 53, 6 SPEC. ISSUE, 06JK02.

研究成果: ジャーナルへの寄稿記事

solid oxide fuel cells
Solid oxide fuel cells (SOFC)
Electrolytes
electrolytes
X ray powder diffraction
2 引用 (Scopus)

Development of power generation device using inverse magnetostriction effect of elastomer material dispersed with magnetic powder

Tsumori, F., Echikawa, S., Hirabayashi, Y., Nakatsuji, T., Osada, T. & Miura, H., 4 1 2014, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 61, 4, p. 193-198 6 p.

研究成果: ジャーナルへの寄稿記事

Elastomers
Magnetostriction
Powders
Power generation
Rubber
2 引用 (Scopus)

Dynamic fracture characteristics of injection molded titanium alloy compacts

Osada, T. & Miura, H., 2014, : : International Journal of Powder Metallurgy (Princeton, New Jersey). 50, 1, p. 25-30 6 p.

研究成果: ジャーナルへの寄稿記事

Titanium alloys
Chromium
Titanium
Fatigue of materials
Hot isostatic pressing

Laser trapping technique in-air by using periodic structured surface substrate

Michihata, M., Hayashi, T. & Takaya, Y., 1 1 2014, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 80, 4, p. 382-387 6 p.

研究成果: ジャーナルへの寄稿記事

Lasers
Substrates
Air
Adhesion
Van der Waals forces

Late-news poster: The study of film formation process by electrospray method to manufacture high productivity organic light-emitting diode devices

Seike, Y., Koishikawa, Y., Kato, M., Miyachi, K., Kurokawa, S., Doi, A., Miyazaki, H. & Adachi, C., 1 1 2014, : : Digest of Technical Papers - SID International Symposium. 45, 1, p. 1593-1596 4 p.

研究成果: ジャーナルへの寄稿記事

Organic light emitting diodes (OLED)
Productivity
Costs
2 引用 (Scopus)

Macromodel for changes in polishing pad surface condition caused by dressing and polishing

Isobe, A., Ogata, K. & Kurokawa, S., 1 1 2014, : : Japanese Journal of Applied Physics. 53, 1, 016501.

研究成果: ジャーナルへの寄稿記事

Polishing
polishing
Chemical mechanical polishing
dummies
Stabilization
2 引用 (Scopus)
Powder metallurgy
Ceramic materials
Machining
Lasers
Laser beam effects
3 引用 (Scopus)

Performance of micro PCD drills in drilling into SiC and effects of ultrasonic vibration

Ohnishi, O., Doi, T., Kurokawa, S., Takahashi, K., Fujita, F., Mizue, H. & Kido, Y., 2 11 2014, : : International Journal of Nanomanufacturing. 10, 1-2, p. 175-184 10 p.

研究成果: ジャーナルへの寄稿記事

Diamond drills
Silicon carbide
Vibrations (mechanical)
Drilling
Ultrasonics

Powder metallurgy in Japan

Miura, H. & Tsumori, F., 2014, : : International Journal of Powder Metallurgy (Princeton, New Jersey). 50, 2, p. 80-82 3 p.

研究成果: ジャーナルへの寄稿記事

Powder metallurgy
Powders
Steel
Bearings (structural)
Metal molding
3 引用 (Scopus)

Reinvestigation of thermoelectric properties of n- and p-type Ba 8-d Au x Si46-x-y clathrate

Munetoh, S., Saisho, M., Oka, T., Osada, T., Miura, H. & Furukimi, O., 1 1 2014, : : Journal of Electronic Materials. 43, 6, p. 2430-2434 5 p.

研究成果: ジャーナルへの寄稿記事

clathrates
Vacancies
Chemical analysis
conduction
arc melting
6 引用 (Scopus)

Simple and simultaneous measurement of five-degrees-of-freedom error motions of high-speed microspindle: Error analysis

Murakami, H., Katsuki, A. & Sajima, T., 4 1 2014, : : Precision Engineering. 38, 2, p. 249-256 8 p.

研究成果: ジャーナルへの寄稿記事

Degrees of freedom (mechanics)
Error analysis
Lenses
Laser beams
Crosstalk
13 引用 (Scopus)

Study of a vibrating fiber probing system for 3-D micro-structures: Performance improvement

Murakami, H., Katsuki, A., Sajima, T. & Suematsu, T., 9 1 2014, : : Measurement Science and Technology. 25, 9, 094010.

研究成果: ジャーナルへの寄稿記事

3D
Microstructure
Circular motion
Fiber
Probe
DNA
Fluorescence
Polarization
Nanoparticles
Nanotechnology
6 引用 (Scopus)

Thermoelectric properties of Ga-doped Ba8Al x Si 46-x clathrate

Onizuka, Y., Oka, T., Osada, T., Miura, H., Munetoh, S. & Furukimi, O., 1 1 2014, : : Journal of Electronic Materials. 43, 6, p. 2059-2063 5 p.

研究成果: ジャーナルへの寄稿記事

clathrates
Doping (additives)
Crystallization
Conduction bands
Crystalline materials
2013

Conformal photo-resist coating technique in the through-silicon via of the semiconductor devices with the rotary atomising aerosol spray

Seike, Y., Ohtsubo, M., Shimai, F., Maruyama, K., Akenaga, H., Kobayashi, Y., Miyachi, K., Amari, M., Doi, T. & Kurokawa, S., 1 1 2013, : : International Journal of Nanomanufacturing. 9, 2, p. 178-193 16 p.

研究成果: ジャーナルへの寄稿記事

Coating techniques
Semiconductor devices
Aerosols
Silicon
Spray nozzles
3 引用 (Scopus)

Improvement of fatigue properties of ni based rene95 superalloy by metal injection molding

Osada, T., Morinaka, S., Xu, Y., Tsumori, F. & Miura, H., 9 1 2013, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 60, 9, p. 387-392 6 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Superalloys
Injection molding
Fatigue of materials
Turbine components
16 引用 (Scopus)

Improvement of solid oxide fuel cell by imprinted micropatterns on electrolyte

Xu, Y., Tsumori, F., Osada, T. & Miura, H., 11 11 2013, : : Micro and Nano Letters. 8, 10, p. 571-574 4 p.

研究成果: ジャーナルへの寄稿記事

solid oxide fuel cells
Solid oxide fuel cells (SOFC)
Electrolytes
electrolytes
Fuel cells
Contact resistance
Wear of materials
Electromotive force
Electric contacts
Electric currents
5 引用 (Scopus)
Milling (machining)
Contact resistance
Wear of materials
Electric contacts
Electromotive force
1 引用 (Scopus)

Mechanisms of local planarization improvement using solo pad in chemical mechanical polishing

Isobe, A., Yokoyama, T., Komiyama, T. & Kurokawa, S., 12 1 2013, : : Japanese Journal of Applied Physics. 52, 12, 126501.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
polishing
Temperature
platens
surface temperature
1 引用 (Scopus)

New model of defect formation caused by retainer ring in chemical mechanical polishing

Isobe, A., Komiyama, T. & Kurokawa, S., 12 2013, : : Japanese Journal of Applied Physics. 52, 12, 126502.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
polishing
Defects
rings
defects
9 引用 (Scopus)

Proposal of new polishing mechanism based on feret's diameter of contact area between polishing pad and wafer

Isobe, A., Akaji, M. & Kurokawa, S., 12 2013, : : Japanese Journal of Applied Physics. 52, 12, 126503.

研究成果: ジャーナルへの寄稿記事

Polishing
polishing
proposals
wafers
Abrasives
2012
Atomizers
Coating techniques
Patents and inventions
Semiconductor devices
Aerosols
7 引用 (Scopus)
Gear teeth
Gears

Dielectric SiO 2 planarization using MnO 2 slurry

Kishii, S., Nakamura, K., Hanawa, K., Watanabe, S., Arimoto, Y., Kurokawa, S. & Doi, T. K., 1 1 2012, : : Japanese journal of applied physics. 51, 1, 016501.

研究成果: ジャーナルへの寄稿記事

abrasives
Abrasives
Inorganic acids
Gibbs free energy
dipping
1 引用 (Scopus)

Effect of groove pattern of chemical mechanical polishing pad on slurry flow behavior

Yamazaki, T., Doi, T. K., Uneda, M., Kurokawa, S., Ohnishi, O., Seshimo, K. & Aida, H., 5 1 2012, : : Japanese Journal of Applied Physics. 51, 5 PART 2, 05EF03.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
Polishing
polishing
grooves
High speed cameras
Alloy steel
Gears
Microstructure
Pore size
Steel
3 引用 (Scopus)

Effect of MIM processing parameters on the properties of 440C stainless steel

Harun, W. S. W., Toda, K., Osada, T., Kang, H., Tsumori, F. & Miura, H., 5 1 2012, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 59, 5, p. 264-271 8 p.

研究成果: ジャーナルへの寄稿記事

Stainless Steel
Powders
Stainless steel
Hydrogen
Sintering
4 引用 (Scopus)

Effects of atmosphere and ultraviolet light irradiation on chemical mechanical polishing characteristics of SiC wafers

Ohnishi, O., Doi, T., Kurokawa, S., Yamazaki, T., Uneda, M., Yin, T., Koshiyama, I., Ichikawa, K. & Aida, H., 5 1 2012, : : Japanese Journal of Applied Physics. 51, 5 PART 2, 05EF05.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
Polishing machines
polishing
Silicon carbide
silicon carbides

Evaluation and analysis of distortion during MIM process of titanium alloy materials - 2nd report -

Virdhian, S., Osada, T., Sonoda, T., Kang, H., Tsumori, F. & Miura, H., 5 1 2012, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 59, 5, p. 272-277 6 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Titanium alloys
Injection molding
Binders
Heating rate

Fast diffusion of water molecules into chemically modified sio2 films formed by chemical vapor deposition

Ohtake, A., Kobayashi, K., Kurokawa, S., Ohnishi, O. & Doi, T., 2012, : : Chemistry Letters. 41, 1, p. 60-61 2 p.

研究成果: ジャーナルへの寄稿記事

Chemical vapor deposition
Molecules
Water
Silicon oxides
Permeation
4 引用 (Scopus)

Investigation of fine heterogeneous microstructure on the mechanical properties of MIM Fe-Ni alloy steels

Wan Harun, W. S., Osada, T., Kang, H., Tsumori, F. & Miura, H., 12 1 2012, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 59, 12, p. 677-684 8 p.

研究成果: ジャーナルへの寄稿記事

Alloy steel
Nickel
Mechanical properties
Microstructure
Powders
11 引用 (Scopus)

Magnetic micro actuator using interactive force between magnetic elements

Hatama, K., Tsumori, F., Xu, Y., Kang, H., Osada, T. & Miura, H., 6 1 2012, : : Japanese Journal of Applied Physics. 51, 6 PART 2, 06FL14.

研究成果: ジャーナルへの寄稿記事

Actuators
actuators
Magnetic actuators
Casting
electric wiring

Mn 2O 3 slurry achieving reduction of slurry waste

Kishii, S., Nakamura, K., Hanawa, K., Watanabe, S., Arimoto, Y., Kurokawa, S. & Doi, T. K., 4 1 2012, : : Japanese journal of applied physics. 51, 4 PART 1, 046506.

研究成果: ジャーナルへの寄稿記事

reuse
Silica
silicon dioxide
slurries
Chemical mechanical polishing

Mn 2O 3 slurry reuse by circulation achieving high constant removal rate

Kishii, S., Nakamura, K., Hanawa, K., Watanabe, S., Arimoto, Y., Kurokawa, S. & Doi, T. K., 4 1 2012, : : Japanese journal of applied physics. 51, 4 PART 2, 04DB07.

研究成果: ジャーナルへの寄稿記事

reuse
Silica
conditioning
silicon dioxide
Chemical mechanical polishing
1 引用 (Scopus)
Angle measurement
Gears
Silicon
Linewidth
Lithography
1 引用 (Scopus)

Performance evaluation method of chemical mechanical polishing pad conditioner using digital image correlation processing

Uneda, M., Omote, T., Ishikawa, K. I., Ichikawa, K., Doi, T., Kurokawa, S. & Ohnishi, O., 5 1 2012, : : Japanese journal of applied physics. 51, 5 PART 2, 05EF02.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
conditioning
polishing
evaluation
textures
Polishing
Glass
Substrates
Processing
Manganese oxide

Precise measurement of micro hole accuracy

Murakami, H., Katsuki, A., Onikura, H. & Sajima, T., 1 1 2012, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 78, 6, p. 465-468 4 p.

研究成果: ジャーナルへの寄稿記事

Surface roughness
1 引用 (Scopus)

Precision profile measurement system for microholes using vibrating optical fiber

Sajima, T., Murakami, H., Katsuki, A., Tabuchi, D., Ohnishi, O., Kurokawa, S., Onikura, H. & Doi, T. K., 11 2 2012, : : Sensors and Materials. 24, 7, p. 387-396 10 p.

研究成果: ジャーナルへの寄稿記事

Optical fibers
optical fibers
profiles
probes
Photodiodes
9 引用 (Scopus)

Real-time evaluation of tool flank wear by in-process contact resistance measurement in face milling

Murata, M., Kurokawa, S., Ohnishi, O., Uneda, M. & Doi, T., 9 25 2012, : : Journal of Advanced Mechanical Design, Systems and Manufacturing. 6, 6, p. 958-970 13 p.

研究成果: ジャーナルへの寄稿記事

Contact resistance
Wear of materials
Electromotive force
Electric currents
Electric contacts
5 引用 (Scopus)

Residual stress of hoop-Wound CFRP composites manufactured with simultaneous heating

Tabuchi, D., Sajima, T., Doi, T., Onikura, H., Ohnishi, O., Kurokawa, S. & Miura, T., 2012, : : Sensors and Materials. 24, 2, p. 99-111 13 p.

研究成果: ジャーナルへの寄稿記事

hoops
carbon fiber reinforced plastics
Carbon fiber reinforced plastics
residual stress
Residual stresses
10 引用 (Scopus)

Study on fabrication of micrometer patterned ceramic sheet with micro powder imprinting (μPI) method

Xu, Y., Tsumori, F., Kang, H. G. & Miura, H., 6 2012, : : Advanced Science Letters. 12, p. 170-173 4 p.

研究成果: ジャーナルへの寄稿記事

imprinting
Ceramics
Powder
ceramics
Powders

The polishing technology for glass substrates using tribo-chemical reaction and electrical slurry control

Ikeda, H., Akagami, Y., Uneda, M., Ohnishi, O., Kurokawa, S. & Doi, T. K., 2012, : : Journal of the Electrochemical Society. 159, 4

研究成果: ジャーナルへの寄稿記事

Polishing
polishing
Chemical reactions
chemical reactions
Glass