研究成果 1989 2020

フィルター
記事
2012
3 引用 (Scopus)

Wear resistance of coating films on hob teeth (Intermittent cutting tests with a flytool)

Umezaki, Y., Funaki, Y., Kurokawa, S., Ohnishi, O. & Doi, T., 2 27 2012, : : Journal of Advanced Mechanical Design, Systems and Manufacturing. 6, 2, p. 206-221 16 p.

研究成果: ジャーナルへの寄稿記事

Wear resistance
Coatings
Wear of materials
Abrasion
Oxidation
2011
5 引用 (Scopus)

Analysis of chemical and mechanical factors in CMP processes for improving material removal rate

Tamai, K., Morinaga, H., Doi, T. K., Kurokawa, S. & Ohnishi, O., 2011, : : Journal of the Electrochemical Society. 158, 3

研究成果: ジャーナルへの寄稿記事

Industrial Oils
machining
abrasives
friction
Abrasives
5 引用 (Scopus)

Application of MIM process for Nickel base superalloy

Ikeda, H., Iwahashi, T., Osada, T. & Miura, H., 1 1 2011, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 1, p. 33-37 5 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Nickel
Superalloys
Injection molding
Powders

Basic studies on tungsten-CMP slurry recycle

Funakoshi, T., Ojima, S., Ishii, K., Doi, T., Kurokawa, S. & Ohnishi, O., 1 1 2011, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 4, p. 388-393 6 p.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
Tungsten
Metals
Water
Processing
2 引用 (Scopus)

CMP characteristics and mechanisms of glass substrate by both conventional cerium oxide (CeO2) slurry and new manganese oxide slurry for replacing CeO2 abrasive

Yamazaki, T., Doi, T. K., Kurokawa, S., Ohnishi, O., Uneda, M., Umezaki, Y., Yamaguchi, Y. & Kishii, S., 1 1 2011, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 10, p. 960-965 6 p.

研究成果: ジャーナルへの寄稿記事

Manganese oxide
Cerium
Abrasives
Glass
Oxides
4 引用 (Scopus)

Comparison of quartz and silicon as a master mold substrate for patterned media UV-NIL replica process

Hoga, M., Itoh, K., Ishikawa, M., Kuwahara, N., Fukuda, M., Toyama, N., Kurokawa, S. & Doi, T., 8 1 2011, : : Microelectronic Engineering. 88, 8, p. 1975-1977 3 p.

研究成果: ジャーナルへの寄稿記事

Nanoimprint lithography
Quartz
Hard disk storage
Silicon
replicas
2 引用 (Scopus)

Development of a Filament-winding machine based on internal heating by a high-temperature fluid for composite vessels

Tabuchi, D., Sajima, T., Doi, T., Onikura, H., Ohnishi, O., Kurokawa, S. & Miura, T., 2011, : : Sensors and Materials. 23, 6, p. 347-358 12 p.

研究成果: ジャーナルへの寄稿記事

filament winding
high temperature fluids
Winding machines
Filament winding
carbon fiber reinforced plastics
Polishing
Abrasives
Electric fields
Glass
Substrates
1 引用 (Scopus)

Development of a laser-guided deep-hole evaluating system

Katsuki, A., Onikura, H., Sajima, T., Murakami, H., Doi, T., Sato, T., Nishi, H., Pietri, V. & Ali, M. H., 1 1 2011, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 10, p. 977-984 8 p.

研究成果: ジャーナルへの寄稿記事

Units of measurement
Lasers
Skids
Prisms
Interferometers
Chemical mechanical polishing
polishing
Oxides
simulators
isolation
15 引用 (Scopus)

Development of a practical high-performance laser-guided deep-hole boring tool: Improvement in guiding strategy

Katsuki, A., Onikura, H., Sajima, T., Mohri, A., Moriyama, T., Hamano, Y. & Murakami, H., 4 1 2011, : : Precision Engineering. 35, 2, p. 221-227 7 p.

研究成果: ジャーナルへの寄稿記事

Boring tools
Lasers
Boring
Aluminum copper alloys
Piezoelectric actuators
1 引用 (Scopus)
Alloy steel
Gears
Fatigue of materials
Microstructure
Steel
15 引用 (Scopus)

Effects of resist thickness and viscoelasticity on the cavity filling capability in bilayer thermal embossing

Xu, Y., Tsumori, F., Toyooka, T., Kotera, H. & Miura, H., 6 2011, : : Japanese Journal of Applied Physics. 50, 6 PART 2, 06GK11.

研究成果: ジャーナルへの寄稿記事

embossing
viscoelasticity
Viscoelasticity
cavities
Polymethyl methacrylates
Gears
Helical gears
Bevel gears
Spur gears
Gear teeth
17 引用 (Scopus)

Fabrication of micro patterned ceramic structure by imprinting process

Xu, Y., Tsumori, F., Kang, H. G. & Miura, H., 11 1 2011, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 11, p. 673-678 6 p.

研究成果: ジャーナルへの寄稿記事

Sintering
Fabrication
Yttria stabilized zirconia
Solid oxide fuel cells (SOFC)
Powders
2 引用 (Scopus)

Fabrication of porous structured WC-Co alloy compacts by indirect laser forming

Kang, H., Ishii, T., Tsumori, F. & Miura, H., 7 1 2011, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 7, p. 436-441 6 p.

研究成果: ジャーナルへの寄稿記事

Fabrication
Lasers
Binders
Liquid phase sintering
Feedstocks
2 引用 (Scopus)

Fabrication of super-elastic Ti-10V-2Fe-3Al alloy compacts by MIM process

Sagara, K., Nishida, M., Kang, H., Tsumori, F., Miura, H. & Nakayama, H., 6 1 2011, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 6, p. 361-366 6 p.

研究成果: ジャーナルへの寄稿記事

Powders
Titanium alloys
Fabrication
Elasticity
Metal molding
4 引用 (Scopus)

Fatigue failure properties of injection molded superalloy compacts

Ikeda, H., Osada, T., Kang, H. G., Tsumori, F. & Miura, H., 11 1 2011, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 11, p. 679-685 7 p.

研究成果: ジャーナルへの寄稿記事

Superalloys
Powders
Metal molding
Fatigue of materials
Injection molding
3 引用 (Scopus)

Fatigue properties of Ti alloy compacts by metal injection molding - Part1

Noda, M., Osada, T., Tsumori, F. & Miura, H., 6 1 2011, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 6, p. 355-360 6 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Titanium
Titanium alloys
Injection molding
Fatigue of materials

Improvement of CFRP pipe's burst strength with SPWC method

Miura, T., Tabuchi, D., Sajima, T., Ohnishi, O., Onikura, H., Doi, T. & Kurokawa, S., 1 1 2011, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 9, p. 856-860 5 p.

研究成果: ジャーナルへの寄稿記事

Carbon fiber reinforced plastics
Volume fraction
Pipe
Resins
Filament winding
2 引用 (Scopus)
Iron alloys
Gear teeth
Gears
Steel
Porosity
Microphones
Acoustic waves
Processing
Acoustic noise
Vibrations (mechanical)
2 引用 (Scopus)

Quantitative evaluation of slurry flow behavior using digital image processing

Uneda, M., Murata, S., Narise, T., Yamazaki, T., Ohnishi, O., Kurokawa, S., Ishikawa, K. I. & Doi, T., 12 1 2011, : : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 77, 782, p. 3891-3903 13 p.

研究成果: ジャーナルへの寄稿記事

Lapping
Image processing
Correlation methods
Brittleness
Abrasives
3 引用 (Scopus)

Study on high-speed on-machine measurement of deep-hole accuracy

Katsuki, A., Onikura, H., Sajima, T., Murakami, H., Sato, T., Caetano, T., Ali, H. & Ohnishi, O., 1 1 2011, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 7, p. 681-687 7 p.

研究成果: ジャーナルへの寄稿記事

Lathes
Boring machines (machine tools)
Drilling machines (machine tools)
Machining centers
Units of measurement
3 引用 (Scopus)

Tungsten film chemical mechanical polishing using MnO2 slurry

Kishii, S., Hatada, A., Arimoto, Y., Kurokawa, S. & Doi, T. K., 7 1 2011, : : Japanese journal of applied physics. 50, 7 PART 1, 076502.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
abrasives
polishing
Abrasives
Tungsten

Wear-resistance of coating films on hob cutting teeth (Intermittent cutting tests with a flytool)

Umezaki, Y., Funaki, Y., Kurokawa, S., Ohnishi, O. & Doi, T., 12 1 2011, : : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 77, 779, p. 2863-2874 12 p.

研究成果: ジャーナルへの寄稿記事

Wear resistance
Coatings
Wear of materials
Oxidation
Abrasion
2010
3 引用 (Scopus)
Gears
Linewidth
Lithography
1 引用 (Scopus)

Development of a system to measure micro hole form accuracy using an optical fiber probe (2nd report) - Evaluation of a prototype of the measuring system

Murakami, H., Katsuki, A., Onikura, H., Sajima, T., Kawagoishi, N. & Kondo, E., 1 1 2010, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 8, p. 950-954 5 p.

研究成果: ジャーナルへの寄稿記事

Optical fibers
Surface roughness
Fibers
Floodlighting
Scanning
1 引用 (Scopus)
Iron alloys
Gear teeth
Gears
Steel
Porosity

Effect of powder type on the rolling contact fatigue strength of 4600 sintered alloy steels

Miura, H., Tsumori, F., Nakahara, Y., Tokuoka, T. & Nishioka, T., 6 1 2010, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 6, p. 419-423 5 p.

研究成果: ジャーナルへの寄稿記事

Alloy steel
Powders
Gears
Steel
Microstructure
1 引用 (Scopus)

Evaluation and analysis of distortion during MIM process of titanium alloy materials

Miura, H., Shinozaki, R., Virdhian, S. & Osada, T., 5 1 2010, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 5, p. 352-356 5 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Titanium alloys
Injection molding
Titanium
Powders

High-densification for ferrous soft magnetic powder by metal injection molding -2nd Report

Osada, T., Tanaka, Y., Miura, H., Tokuoka, T. & Nishioka, T., 6 1 2010, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 6, p. 387-393 7 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Densification
Injection molding
Powders
Magnetic properties
3 引用 (Scopus)

Improvement of the contact fatigue strength by rolling of sintered ferrous alloy rolle -2nd Report

Miura, H., Tsumori, F., Hamamoto, S., Komoto, K. & Unami, S., 6 1 2010, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 6, p. 430-434 5 p.

研究成果: ジャーナルへの寄稿記事

Iron alloys
Case hardening
Fatigue damage
Powder metallurgy
Porosity
1 引用 (Scopus)

Influence of wafer edge profile on STI-CMP process performance (examination based on surface pressure of wafer calculated by FEM analysis)

Fukuda, A., Fukuda, T., Hiyama, H., Tsujimura, M., Doi, T., Kurokawa, S. & Ohnishi, O., 1 1 2010, : : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 76, 766, p. 1610-1616 7 p.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
Finite element method
Semiconductor materials
Bellows
Specifications
Cytidine Monophosphate
Chemical mechanical polishing
abrasives
Silicon
Polishing
Cytidine Monophosphate
Chemical mechanical polishing
abrasives
Silicon
Polishing
4 引用 (Scopus)

Nitriding response of microminiature powder injection molded titanium

Osada, T. & Miura, H., 3 2010, : : International Journal of Powder Metallurgy (Princeton, New Jersey). 46, 2, p. 39-44 6 p.

研究成果: ジャーナルへの寄稿記事

Nitriding
Titanium
Powders
Sintering
Furnaces
2 引用 (Scopus)

Removal rate simulation of dissolution-type electrochemical mechanical polishing

Fukuda, A., Kodera, A., Toma, Y., Suzuki, T., Hiyama, H., Doi, T., Kurokawa, S. & Ohnishi, O., 7 1 2010, : : Japanese Journal of Applied Physics. 49, 7 PART 1, p. 767011-767018 8 p.

研究成果: ジャーナルへの寄稿記事

Polishing
polishing
dissolving
Dissolution
apertures

Research on cleaning efficiency of high pressure micro jet - Influence of different shape nozzles in cleaning efficiency

Miyachi, K., Kurokawa, S., Kawashima, S., Akenaga, H., Seike, Y., Kobayashi, Y., Ohnishi, O. & Doi, T., 1 1 2010, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 8, p. 907-911 5 p.

研究成果: ジャーナルへの寄稿記事

Cleaning
Nozzles
Liquids
Nozzle design
Spray nozzles
10 引用 (Scopus)

Silicon wafer cleaning using new liquid aerosol with controlled droplet velocity and size by rotary atomizer method

Seike, Y., Miyachi, K., Shibata, T., Kobayashi, Y., Kurokawa, S. & Doi, T., 6 1 2010, : : Japanese journal of applied physics. 49, 6 PART 1, p. 667011-667016 6 p.

研究成果: ジャーナルへの寄稿記事

atomizers
Atomizers
Silicon wafers
cleaning
Aerosols
Sintering
Metals
Lasers
Microstructure
Laser beam effects
1 引用 (Scopus)

Unwoven fabric pads non-destructive conditioning by high pressure micro jet in CMP process

Miyachi, K., Kurokawa, S., Doi, T., Seike, Y., Izumikawa, S., Akama, T. & Ohnishi, O., 1 1 2010, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 9, p. 1076-1081 6 p.

研究成果: ジャーナルへの寄稿記事

Silicon wafers
Textiles
Surveying
Diamonds
Experiments
2009
Cleaning
Fluids
Liquids
Latexes
Particles (particulate matter)

Causal relation between ultrasonic vibration cutting and corrosion resistance

Onikura, H., Kanda, T., Ohnishi, O. & Sajima, T., 1 1 2009, : : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 75, 757, p. 2394-2398 5 p.

研究成果: ジャーナルへの寄稿記事

Vibrations (mechanical)
Corrosion resistance
Ultrasonics
Corrosion
Residual stresses
Chemical mechanical polishing
Topography
Metals
Silicon
Copper
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
1 引用 (Scopus)

Development of a micro hole measuring system using an optical fiber probe (1st report) - Optical analysis and accuracy evaluation

Murakami, H., Katsuki, A., Onikura, H., Sajima, T. & Kondo, E., 1 1 2009, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 75, 12, p. 1476-1481 6 p.

研究成果: ジャーナルへの寄稿記事

Optical fibers
Fibers
Floodlighting
Ray tracing
Optical systems
6 引用 (Scopus)

Effect of particle size of powders on the micro metal injection molding process

Osada, T., Tominaga, M. & Miura, H., 5 1 2009, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 5, p. 264-267 4 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Injection molding
Powders
Particle size
Feedstocks
2 引用 (Scopus)

Effects of rolling on the tooth root bending fatigue strength of sintered ferrous alloy gears

Miura, H., Osada, T., Suda, N., Komoto, K., Hamamoto, S. & Unami, S., 6 1 2009, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 6, p. 344-349 6 p.

研究成果: ジャーナルへの寄稿記事

Iron alloys
Gears
Porosity
Hardness
Gear teeth
2 引用 (Scopus)

Evaluation of gear engagement accuracy by Transmission Error with sub-microradian resolution

Kurokawa, S., Ariura, Y., Matsukawa, Y. & Doi, T., 2009, : : International Journal of Surface Science and Engineering. 3, 3, p. 160-177 18 p.

研究成果: ジャーナルへの寄稿記事

Gears
eccentricity
evaluation
coders
test equipment