研究成果 1989 2020

フィルター
記事
2010

Research on cleaning efficiency of high pressure micro jet - Influence of different shape nozzles in cleaning efficiency

Miyachi, K., Kurokawa, S., Kawashima, S., Akenaga, H., Seike, Y., Kobayashi, Y., Ohnishi, O. & Doi, T., 1 1 2010, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 8, p. 907-911 5 p.

研究成果: ジャーナルへの寄稿記事

Cleaning
Nozzles
Liquids
Nozzle design
Spray nozzles
11 引用 (Scopus)

Silicon wafer cleaning using new liquid aerosol with controlled droplet velocity and size by rotary atomizer method

Seike, Y., Miyachi, K., Shibata, T., Kobayashi, Y., Kurokawa, S. & Doi, T., 6 1 2010, : : Japanese Journal of Applied Physics. 49, 6 PART 1, p. 667011-667016 6 p.

研究成果: ジャーナルへの寄稿記事

atomizers
Atomizers
Silicon wafers
cleaning
Aerosols
Sintering
Metals
Lasers
Microstructure
Laser beam effects
1 引用 (Scopus)

Unwoven fabric pads non-destructive conditioning by high pressure micro jet in CMP process

Miyachi, K., Kurokawa, S., Doi, T., Seike, Y., Izumikawa, S., Akama, T. & Ohnishi, O., 1 1 2010, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 9, p. 1076-1081 6 p.

研究成果: ジャーナルへの寄稿記事

Silicon wafers
Textiles
Surveying
Diamonds
Experiments
2009
Cleaning
Fluids
Liquids
Latexes
Particles (particulate matter)
1 引用 (Scopus)
numerical analysis
Numerical analysis
Compaction
Powders
Processing

Causal relation between ultrasonic vibration cutting and corrosion resistance

Onikura, H., Kanda, T., Ohnishi, O. & Sajima, T., 1 1 2009, : : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 75, 757, p. 2394-2398 5 p.

研究成果: ジャーナルへの寄稿記事

Vibrations (mechanical)
Corrosion resistance
Ultrasonics
Corrosion
Residual stresses
Chemical mechanical polishing
Topography
Metals
Silicon
Copper
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
1 引用 (Scopus)

Development of a micro hole measuring system using an optical fiber probe (1st report) - Optical analysis and accuracy evaluation

Murakami, H., Katsuki, A., Onikura, H., Sajima, T. & Kondo, E., 1 1 2009, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 75, 12, p. 1476-1481 6 p.

研究成果: ジャーナルへの寄稿記事

Optical fibers
Fibers
Floodlighting
Ray tracing
Optical systems
13 引用 (Scopus)
Magnetic actuators
Powders
Actuators
Steepest descent method
Elastic deformation
6 引用 (Scopus)

Effect of particle size of powders on the micro metal injection molding process

Osada, T., Tominaga, M. & Miura, H., 5 1 2009, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 5, p. 264-267 4 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Injection molding
Powders
Particle size
Feedstocks
2 引用 (Scopus)

Effects of rolling on the tooth root bending fatigue strength of sintered ferrous alloy gears

Miura, H., Osada, T., Suda, N., Komoto, K., Hamamoto, S. & Unami, S., 6 1 2009, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 6, p. 344-349 6 p.

研究成果: ジャーナルへの寄稿記事

Iron alloys
Gears
Porosity
Hardness
Gear teeth
2 引用 (Scopus)

Evaluation of gear engagement accuracy by Transmission Error with sub-microradian resolution

Kurokawa, S., Ariura, Y., Matsukawa, Y. & Doi, T., 2009, : : International Journal of Surface Science and Engineering. 3, 3, p. 160-177 18 p.

研究成果: ジャーナルへの寄稿記事

Gears
eccentricity
evaluation
coders
test equipment
Finite difference method
Powders
Particle interactions
1 引用 (Scopus)

High-densification for ferrous soft magnetic powder by metal injection molding

Osada, T., Tanaka, Y., Miura, H., Tokuoka, T. & Nishioka, T., 5 1 2009, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 5, p. 248-252 5 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Densification
Injection molding
Powders
Magnetic properties
1 引用 (Scopus)

Improvement of the contact fatigue strength by rolling of sintered ferrous alloy roller-1st report

Miura, H., Osada, T., Hamamoto, S., Komoto, K., Tsuchihashi, N. & Unami, S., 6 1 2009, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 6, p. 325-329 5 p.

研究成果: ジャーナルへの寄稿記事

Iron alloys
Porosity
Fatigue damage
Powder metallurgy
Hardness
1 引用 (Scopus)

Past and future of CMP Technology

Doi, T. & Kurokawa, S., 1 2009, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 75, 1, p. 76-77 2 p.

研究成果: ジャーナルへの寄稿記事

22 引用 (Scopus)

Performance of water-soluble fullerenol as novel functional molecular abrasive grain for polishing nanosurfaces

Takaya, Y., Tachika, H., Hayashi, T., Kokubo, K. & Suzuki, K., 4 24 2009, : : CIRP Annals - Manufacturing Technology. 58, 1, p. 495-498 4 p.

研究成果: ジャーナルへの寄稿記事

Polishing
Abrasives
Water
Chemical mechanical polishing
Surface roughness
12 引用 (Scopus)

Probing technique using circular motion of a microsphere controlled by optical pressure for a nanocoordinate measuring machine

Michihata, M., Nagasaka, Y., Hayashi, T. & Takaya, Y., 1 10 2009, : : Applied Optics. 48, 2, p. 198-205 8 p.

研究成果: ジャーナルへの寄稿記事

Microspheres
probes
Orbits
circular orbits
ellipses

Resin/metal extrusion for fabricating porous aluminum

Shinagawa, K., Hirai, M., Ohara, M. & Mihara, Y., 8 1 2009, : : Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A. 75, 756, p. 1118-1123 6 p.

研究成果: ジャーナルへの寄稿記事

Metal extrusion
Aluminum
Extrusion
Resins
Aramid fibers
1 引用 (Scopus)
Stress analysis
Powders
Sintering
Cermets
Constitutive models
2 引用 (Scopus)

Stress analysis of dielectrics using FEM for Analyzing the cause of cracking observed after W-CMP

Fukuda, A., Mochizuki, Y., Hiyama, H., Tsujimura, M., Doi, T. & Kurokawa, S., 8 7 2009, : : Journal of the Electrochemical Society. 156, 9

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
Stress analysis
Finite element method
Polishing
Oxides
Chemical mechanical polishing
Copper
Metals
Erosion
Tantalum
2008
1 引用 (Scopus)
Optical systems
Semiconductor lasers
CCD cameras
Measurement errors
Charge coupled devices
3 引用 (Scopus)
Optical systems
Ring gages
Laser beams
4 引用 (Scopus)

Development of selective laser sintering for titanium alloy powder -3rd report

Miura, H., Osada, T., Ishibashi, H., Okawachi, K., Uemura, M., Fujita, M. & Arimoto, N., 10 1 2008, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 55, 10, p. 738-742 5 p.

研究成果: ジャーナルへの寄稿記事

Titanium alloys
Powders
Sintering
Lasers
Bone
16 引用 (Scopus)

Effects of irradiance of various wavelengths from light-emitting diodes on the growth of the harmful dinoflagellate Heterocapsa circularisquama and the diatom Skeletonema costatum

Oh, S. J., Kim, D. I., Sajima, T., Shimasaki, Y., Matsuyama, Y., Oshima, Y., Honjo, T. & Yang, H. S., 2 1 2008, : : Fisheries science. 74, 1, p. 137-145 9 p.

研究成果: ジャーナルへの寄稿記事

Skeletonema costatum
Bacillariophyceae
dinoflagellate
irradiance
wavelengths
10 引用 (Scopus)

Frictional characterization of chemical-mechanical polishing pad surface and diamond conditioner wear

Yamada, Y., Kawakubo, M., Hirai, O., Konishi, N., Kurokawa, S. & Doi, T., 8 8 2008, : : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 47, 8 PART 1, p. 6282-6287 6 p.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
polishing
Diamonds
diamonds
Wear of materials
9 引用 (Scopus)

Gene transfer device utilizing micron-spiked electrodes produced by the self-organization phenomenon of Fe-alloy

Miyano, N., Inoue, Y., Teramura, Y., Fujii, K., Tsumori, F., Iwata, H. & Kotera, H., 1 1 2008, : : Lab on a Chip. 8, 7, p. 1104-1109 6 p.

研究成果: ジャーナルへの寄稿記事

Gene transfer
Precipitates
Electrodes
Equipment and Supplies
Genes
16 引用 (Scopus)

Optimization of MIM process for Ti-6Al-7Nb alloy powder

Osada, T., Miura, H., Itoh, Y., Fujita, M. & Arimoto, N., 10 1 2008, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 55, 10, p. 726-731 6 p.

研究成果: ジャーナルへの寄稿記事

Powders
Metal molding
Mechanical properties
Vanadium
Biocompatible Materials
5 引用 (Scopus)

Study on factors in time-dependent dielectric breakdown degradation of Cu/low-k integration related to Cu chemical-mechanical polishing

Yamada, Y., Konishi, N., Noguchi, J., Jimbo, T., Kurokawa, S. & Doi, T., 6 13 2008, : : Japanese Journal of Applied Physics. 47, 6 PART 1, p. 4469-4474 6 p.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
Electric breakdown
polishing
breakdown
degradation
1 引用 (Scopus)

Study on hard-pad-based CMP of dielectric global planarization -Improvement of with-in-wafer non-uniformity (WIWNU) in CMP process-

Yamada, Y., Sugaya, T., Konishi, N., Kurokawa, S. & Toshiro, D. O. I., 11 2008, : : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 74, 11, p. 1199-1203 5 p.

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
Logic devices
Polishing
Semiconductor materials
Degradation
5 引用 (Scopus)

Tribological behavior of metal CMP and detection of process abnormality

Yamada, Y., Kawakubo, M., Hirai, O., Konishi, N., Kurokawa, S. & Doi, T., 7 11 2008, : : Journal of the Electrochemical Society. 155, 8, p. H569-H574

研究成果: ジャーナルへの寄稿記事

Chemical mechanical polishing
abnormalities
polishing
Metals
metals
2007
Optical systems
Laser beams
Lenses
Experiments
Function evaluation
1 引用 (Scopus)

Fatigue and tensile properties of pallets made from waste plastics

Takeda, K., Hiraba, T., Ebara, R., Shinagawa, K., Hirai, M., Nonomura, T. & Morimoto, I., 8 1 2007, : : Key Engineering Materials. 348-349, p. 653-656 4 p.

研究成果: ジャーナルへの寄稿記事

Pallets
Polyethylene
Tensile properties
Polyethylenes
Polypropylenes
3 引用 (Scopus)

Local surface coating with Al powder for iron by using a laser-heating

Suzuki, T., Tange, M., Morita, T., Hayashi, T., Murakami, K., Tomota, Y. & Maekawa, K., 6 1 2007, : : Tetsu-To-Hagane/Journal of the Iron and Steel Institute of Japan. 93, 6, p. 445-450 6 p.

研究成果: ジャーナルへの寄稿記事

Laser heating
laser heating
Powders
Iron
Aluminum

The spark plasma sintering method using laminated titanium powder sheet for fabricating porous biocompatible implants

Maekawa, K., Hayashi, T., Hanyu, K., Umeda, K. & Murakami, T., 1 1 2007, : : High Temperature Materials and Processes. 26, 4, p. 285-290 6 p.

研究成果: ジャーナルへの寄稿記事

Titanium sheet
Spark plasma sintering
sparks
Titanium
Powders
2006
2 引用 (Scopus)
Multilayers
Sintering
Cooling
Tensile stress
Residual stresses
3 引用 (Scopus)

Effects of metal powder characteristics on the compactibility and sinterability in micro metal injection molding process

Osada, T., Nishiyabu, K., Matsuzaki, S., Tanaka, S. & Miura, H., 1 1 2006, : : Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A. 72, 1, p. 148-153 6 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Powder metals
Injection molding
Powders
Feedstocks
Powders
Compaction
Fabrication
Microstructure
Waxes
3 引用 (Scopus)
Stainless Steel
Alloying
Stainless steel
Lasers
Substrates
1 引用 (Scopus)
Powders
Adhesion
Unloading
Compaction
Liquids
2 引用 (Scopus)

Size effects of gas nitriding of injection molded Titanium parts

Osada, T., Tanaka, S., Nishiyabu, K. & Miura, H., 9 1 2006, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 53, 9, p. 745-749 5 p.

研究成果: ジャーナルへの寄稿記事

Metal molding
Nitriding
Titanium
Injection molding
Gases
2005
3 引用 (Scopus)

Development of a laser-guided deep-hole internal-grinding tool (series 1): Grinding forces

Katsuki, A., Onikura, H., Sajima, T. & Park, H., 12 1 2005, : : Memoirs of the Faculty of Engineering, Kyushu University. 65, 4, p. 143-155 13 p.

研究成果: ジャーナルへの寄稿記事

Grinding wheels
grinding
laser
Lasers
Piezoelectric actuators
3 引用 (Scopus)
shot
topography
arcs
evaluation
profilometers
2 引用 (Scopus)

Flow of magnetic powder in stepped cavity shape under applied magnetic field

Tsumori, F., Kurihara, F., Kotera, H. & Shima, S., 1 1 2005, : : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 52, 6, p. 458-463 6 p.

研究成果: ジャーナルへの寄稿記事

Powders
Magnetic fields
Magnetic flux
Magnets
Powder metallurgy