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研究成果 1982 2018

  • 495 引用
  • 10 h指数
  • 41 記事
  • 18 会議での発言
  • 7 Conference article
2018

A 10 Hz Short-Pulse CO 2 Laser System for Extreme Ultraviolet Source

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Fujii, Y., Takahashi, A., Nakamura, D., Okada, T., Miura, T. & Higashiguchi, T., 1 1 2018, X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. Kawachi, T., Bulanov, S. V., Daido, H. & Kato, Y. (版). Springer Science and Business Media, LLC, p. 367-371 5 p. (Springer Proceedings in Physics; 巻数 202).

研究成果: 著書/レポートタイプへの貢献会議での発言

pulses
lasers
power amplifiers
repetition
pulse duration
Radium
Signal-To-Noise Ratio
Photons
Radioisotopes
Bone and Bones
Yttrium
Single-Photon Emission-Computed Tomography
Positron-Emission Tomography
Noise
Beta Particles
2 引用 (Scopus)

Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Hara, H., Fujii, Y., Hatano, T., Ejima, T., Jiang, W., Sunahara, A., Takahashi, A., Nakamura, D., Okada, T., Sakaue, K., Miura, T., O'Sullivan, G. & Higashiguchi, T., 7 2018, : : Japanese Journal of Applied Physics. 57, 7, 070311.

研究成果: ジャーナルへの寄稿記事

Carbon dioxide lasers
Semiconductor switches
Laser produced plasmas
carbon dioxide lasers
ultraviolet emission
2016
4 引用 (Scopus)

A Monte Carlo study on 223Ra imaging for unsealed radionuclide therapy

Takahashi, A., Miwa, K., Sasaki, M. & Baba, S., 6 1 2016, : : Medical physics. 43, 6, p. 2965-2974 10 p.

研究成果: ジャーナルへの寄稿記事

Photons
Radionuclide Imaging
Radioisotopes
Therapeutics
Monte Carlo Method
1 引用 (Scopus)

Analysis of the influence of 111In on 90Y-bremsstrahlung SPECT based on Monte Carlo simulation

Shiba, H., Takahashi, A., Baba, S., Himuro, K., Yamashita, Y. & Sasaki, M., 12 1 2016, : : Annals of Nuclear Medicine. 30, 10, p. 675-681 7 p.

研究成果: ジャーナルへの寄稿記事

Single-Photon Emission-Computed Tomography
Noise
Beta Particles
Gamma Rays
Photons
2015
Monte Carlo Method
Radiation Protection
Nuclear Medicine
Single-Photon Emission-Computed Tomography
Radioisotopes

Development of short pulse CO 2 laser for efficient rare earth plasma extreme ultraviolet sources

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Fujii, Y., Nanto, K., Takahashi, A., Nakamura, D., Okada, T., Makimura, T., Miura, T., Endo, A., Mocek, T., Dunne, P., O'Sullivan, G. & Higashiguchi, T., 11 9 2015, 2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc., p. 78-79 2 p. 7323554. (2015 IEEE Photonics Conference, IPC 2015).

研究成果: 著書/レポートタイプへの貢献会議での発言

Rare earth elements
Rare earths
Laser pulses
Plasmas
Lasers
5 引用 (Scopus)

Generation of radially polarized high energy mid-infrared optical vortex by use of a passive axially symmetric ZnSe waveplate

Wakayama, T., Oikawa, H., Sasanuma, A., Arai, G., Fujii, Y., Dinh, T. H., Higashiguchi, T., Sakaue, K., Washio, M., Miura, T., Takahashi, A., Nakamura, D., Okada, T., Yonemura, M. & Otani, Y., 8 24 2015, : : Applied Physics Letters. 107, 8, 081112.

研究成果: ジャーナルへの寄稿記事

zinc selenides
vortices
pulses
energy conversion efficiency
energy
8 引用 (Scopus)

Monte Carlo simulation of PET and SPECT imaging of 90Y

Takahashi, A., Himuro, K., Yamashita, Y., Komiya, I., Baba, S. & Sasaki, M., 4 1 2015, : : Medical Physics. 42, 4, p. 1926-1935 10 p.

研究成果: ジャーナルへの寄稿記事

Single-Photon Emission-Computed Tomography
Positron-Emission Tomography
Photons
Electrons
Noise
2013

Ablation process of PMMA induced by irradiation with laser plasma EUV light

Sugiura, N., Torii, S., Makimura, T., Ichinosawa, Y., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., 10 18 2013, 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 6600550

研究成果: 著書/レポートタイプへの貢献会議での発言

Polymethyl Methacrylate
Ablation
laser plasmas
ablation
Irradiation
28 引用 (Scopus)

Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma

Higashiguchi, T., Li, B., Suzuki, Y., Kawasaki, M., Ohashi, H., Torii, S., Nakamura, D., Takahashi, A., Okada, T., Jiang, W., Miura, T., Endo, A., Dunne, P., O'Sullivan, G. & Makimura, T., 12 30 2013, : : Optics Express. 21, 26, p. 31837-31845 9 p.

研究成果: ジャーナルへの寄稿記事

ultraviolet emission
laser plasmas
infrared lasers
rare earth elements
energy conversion efficiency

Micromachining of polydimethylsiloxane using EUV light

Fukami, S., Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., 10 18 2013, 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 6600551. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Micromachining
Polydimethylsiloxane
micromachining
Chemical modification
radiant flux density
1 引用 (Scopus)

Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas

Makimura, T., Torii, S., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., 8 1 2013, Damage to VUV, EUV, and X-Ray Optics IV; and EUV and X-Ray Optics: Synergy Between Laboratory and Space III. 877706. (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 8777).

研究成果: 著書/レポートタイプへの貢献会議での発言

Laser-produced Plasma
Laser produced plasmas
Micromachining
inorganic materials
organic materials
2011

Micromachining of polydimethylsiloxane induced by laser plasma EUV light

Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., 7 25 2011, Damage to VUV, EUV, and X-Ray Optics III. 807714. (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 8077).

研究成果: 著書/レポートタイプへの貢献会議での発言

Laser Plasma
Micromachining
Polydimethylsiloxane
micromachining
laser plasmas
3 引用 (Scopus)

Micromachining of polymethylmethacrylate and polydimethylsiloxane using laser plasma soft X-rays

Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., 12 1 2011, : : Journal of Laser Micro Nanoengineering. 6, 3, p. 235-238 4 p.

研究成果: ジャーナルへの寄稿記事

Micromachining
Polydimethylsiloxane
micromachining
laser plasmas
Plasmas
1 引用 (Scopus)

Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining

Makimura, T., Torii, S., Okazaki, K., Nakamura, D., Takahashi, A., Niino, H., Okada, T. & Murakami, K., 7 25 2011, Damage to VUV, EUV, and X-Ray Optics III. 80770F. (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 8077).

研究成果: 著書/レポートタイプへの貢献会議での発言

Laser Plasma
Block Copolymers
Micromachining
Ablation
micromachining
1 引用 (Scopus)

Sub-wavelength micromachining of silica glass by irradiation of CO 2 laser with Fresnel diffraction

Okazaki, K., Torii, S., Makimura, T., Niino, H., Murakami, K., Nakamura, D., Takahashi, A. & Okada, T., 8 1 2011, : : Applied Physics A: Materials Science and Processing. 104, 2, p. 593-599 7 p.

研究成果: ジャーナルへの寄稿記事

Fresnel diffraction
Micromachining
silica glass
Carbon Monoxide
Fused silica
2010
10 引用 (Scopus)

Direct etching of poly(methyl methacrylate) using laser plasma soft X-rays

Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., 6 1 2010, : : Applied Physics Express. 3, 6, 066502.

研究成果: ジャーナルへの寄稿記事

Polymethyl methacrylates
laser plasmas
polymethyl methacrylate
Etching
etching

Micromachining of silica glass using EUV radiation of laser-produced plasma

Takahashi, A., Torii, S., Makimura, T., Murakami, K., Okazaki, K., Nakamura, D., Okada, T. & Niino, H., 2010, : : IEEJ Transactions on Electronics, Information and Systems. 130, 10

研究成果: ジャーナルへの寄稿記事

Laser produced plasmas
Micromachining
Fused silica
Ultraviolet radiation
Lasers

Micromachining of transparent materials with Fresnel diffraction of infrared radiation

Okazaki, K., Torii, S., Makimura, T., Niino, H., Murakami, K., Nakamura, D., Takahashi, A. & Okada, T., 12 1 2010, : : Journal of Laser Micro Nanoengineering. 5, 3, p. 269-272 4 p.

研究成果: ジャーナルへの寄稿記事

Fresnel diffraction
transparence
Micromachining
infrared radiation
silica glass

Sub-wavelength micromachining of silica glass by irradiation of infrared laser with Fresnel diffraction

Okazaki, K., Nakamura, D., Okada, T., Niino, H., Torii, S., Makimura, T., Murakami, K. & Takahashi, A., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1905-1908 4 p. 5686422

研究成果: 著書/レポートタイプへの貢献会議での発言

Infrared lasers
Micromachining
Fused silica
Diffraction
Irradiation
2009

Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source

Nakamura, D., Okazaki, K., Akiyama, T., Toya, K., Takahashi, A., Okada, T., Yanagida, T., Ueno, Y., Sasaki, Y., Suganuma, T., Nakano, M., Komori, H., Sumitani, A. & Endo, A., 12 10 2009, CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics. 5292242. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Extreme ultraviolet lithography
Tin
Ablation
ablation
Light sources

Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source

Nakamura, D., Okazaki, K., Akiyama, T., Toya, K., Takahashi, A., Okada, T., Yanagida, T., Ueno, Y., Sasaki, Y., Suganuma, T., Nakano, M., Komori, H., Sumitani, A. & Endo, A., 12 1 2009, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009. (Optics InfoBase Conference Papers).

研究成果: 著書/レポートタイプへの貢献会議での発言

Extreme ultraviolet lithography
Ablation
Tin
ablation
Light sources
4 引用 (Scopus)

Dynamics of debris from laser-irradiated Sn droplet for EUV lithography light source

Okazaki, K., Nakamura, D., Akiyama, T., Toya, K., Takahashi, A. & Okada, T., 5 25 2009, : : Proceedings of SPIE - The International Society for Optical Engineering. 7201, 72010T.

研究成果: ジャーナルへの寄稿Conference article

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
debris
Debris
Droplet
2008
8 引用 (Scopus)

Ablation dynamics of tin micro-droplet irradiated by double pulse laser used for extreme ultraviolet lithography source

Nakamura, D., Akiyama, T., Okazaki, K., Tamaru, K., Takahashi, A. & Okada, T., 2008, : : Journal Physics D: Applied Physics. 41, 24, 245210.

研究成果: ジャーナルへの寄稿記事

Extreme ultraviolet lithography
Tin
Ablation
ablation
Laser pulses
5 引用 (Scopus)

Comparative study on EUV and debris emission from CO 2 and Nd: YAG laser-produced tin plasmas

Takahashi, A., Nakamura, D., Tamaru, K., Akiyama, T. & Okada, T., 6 12 2008, : : Journal of Physics: Conference Series. 112, Part 4, 042059.

研究成果: ジャーナルへの寄稿Conference article

debris
YAG lasers
tin
lithography
lasers

Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

Nakamura, D., Tamaru, K., Akiyama, T., Takahashi, A. & Okada, T., 6 17 2008, Photon Processing in Microelectronics and Photonics VII. 687909. (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 6879).

研究成果: 著書/レポートタイプへの貢献会議での発言

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
Nd:YAG Laser
Tin
debris
19 引用 (Scopus)

Emission characteristics of debris from CO2 and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source

Takahashi, A., Nakamura, D., Tamaru, K., Akiyama, T. & Okada, T., 7 1 2008, : : Applied Physics B: Lasers and Optics. 92, 1, p. 73-77 5 p.

研究成果: ジャーナルへの寄稿記事

debris
YAG lasers
tin
light sources
lithography
4 引用 (Scopus)

Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source

Nakamura, D., Tamaru, K., Akiyama, T., Takahashi, A. & Okada, T., 9 1 2008, : : Applied Physics A: Materials Science and Processing. 92, 4, p. 767-772 6 p.

研究成果: ジャーナルへの寄稿記事

Extreme ultraviolet lithography
Tin
debris
Debris
Light sources
2007
1 引用 (Scopus)

Characteristics of extreme ultraviolet emission from CO 2 laser-produced plasma

Takahashi, A., Tanaka, H., Hashimoto, Y. & Okada, T., 1 1 2007, : : IEEJ Transactions on Electronics, Information and Systems. 127, 2, p. 155-159 5 p.

研究成果: ジャーナルへの寄稿記事

Laser produced plasmas
Conversion efficiency
Extreme ultraviolet lithography
Lasers
Tin
1 引用 (Scopus)

Development of visualization system of neutral particles generated from laser-produced Plasma for an EUV light source

Tanaka, H., Matsumoto, A., Takahashi, A. & Okada, T., 4 1 2007, : : Journal of Physics: Conference Series. 59, 1, p. 758-761 4 p., 162.

研究成果: ジャーナルへの寄稿記事

neutral particles
neutral atoms
laser plasmas
debris
ultraviolet radiation

Laser-imaging diagnostics of debris behavior from laser-produced tin plasma for EUV light sources

Nakamura, D., Tanaka, H., Hashimoto, Y., Tamaru, K., Takahashi, A. & Okada, T., 5 18 2007, Photon Processing in Microelectronics and Photonics VI. 巻 6458. 645808

研究成果: 著書/レポートタイプへの貢献会議での発言

Tin
neutral atoms
debris
Debris
Ultraviolet

Laser-imaging of laser-produced tin plume behavior for EUV light source

Nakamura, D., Hashimoto, Y., Tamaru, K., Takahashi, A. & Okada, T., 1 1 2007, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, (Optics InfoBase Conference Papers).

研究成果: 著書/レポートタイプへの貢献会議での発言

laser induced fluorescence
Tin
plumes
Light sources
tin

Laser-imaging of laser-produced tin plume behavior for EUV light source

Nakamura, D., Hashimoto, Y., Tamaru, K., Takahashi, A. & Okada, T., 12 1 2007, 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 4391455. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Tin
laser induced fluorescence
plumes
Light sources
tin
21 引用 (Scopus)

Mitigation of fast ions generated from laser-produced Sn plasma for extreme ultraviolet light source by H2 gas

Nakamura, D., Tamaru, K., Hashimoto, Y., Okada, T., Tanaka, H. & Takahashi, A., 12 1 2007, : : Journal of Applied Physics. 102, 12, 123310.

研究成果: ジャーナルへの寄稿記事

ultraviolet radiation
light sources
gases
laser induced fluorescence
lasers

Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source

Tamaru, K., Nakamura, D., Takahashi, A. & Okada, T., 1 1 2007, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, (Optics InfoBase Conference Papers).

研究成果: 著書/レポートタイプへの貢献会議での発言

Laser produced plasmas
laser plasmas
debris
Debris
Light sources
2006
24 引用 (Scopus)

Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique

Tanaka, H., Hashimoto, Y., Tamaru, K., Takahashi, A. & Okada, T., 11 13 2006, : : Applied Physics Letters. 89, 18, 181109.

研究成果: ジャーナルへの寄稿記事

laser plasmas
debris
imaging techniques
ultraviolet radiation
laser induced fluorescence
2005
133 引用 (Scopus)

Comparative study on emission characteristics of extreme ultraviolet radiation from CO 2 and Nd:YAG laser-produced tin plasmas

Tanaka, H., Matsumoto, A., Akinaga, K., Takahashi, A. & Okada, T., 7 25 2005, : : Applied Physics Letters. 87, 4, 041503.

研究成果: ジャーナルへの寄稿記事

extreme ultraviolet radiation
laser plasmas
YAG lasers
tin
ultraviolet radiation

Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source

Matsumoto, A., Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2005, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. p. 1500-1501 2 p. 1569794. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 巻数 2005).

研究成果: 著書/レポートタイプへの貢献会議での発言

neutral particles
Rayleigh scattering
electromagnetic absorption
laser plasmas
ultraviolet radiation

Direct comparison of emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced plasmas with solid tin target

Tanaka, H., Matsumoto, A., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2005, International Quantum Electronics Conference 2005. p. 1151-1152 2 p. 1561042. (IQEC, International Quantum Electronics Conference Proceedings; 巻数 2005).

研究成果: 著書/レポートタイプへの貢献会議での発言

extreme ultraviolet radiation
laser plasmas
YAG lasers
tin
2004
2 引用 (Scopus)

Broadband light source based on stimulated Raman scattering in silica optical fiber for optical coherence tomography

Higashihata, M., Nakamura, T., Takahashi, A., Nakata, Y. & Okada, T., 7 2004, : : Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. 43, 7 A, p. 4195-4197 3 p.

研究成果: ジャーナルへの寄稿記事

Stimulated Raman scattering
Optical tomography
Light sources
Optical fibers
light sources
12 引用 (Scopus)

Development of a target for laser-produced plasma EUV light source using Sn nano-particles

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 1 1 2004, : : Applied Physics A: Materials Science and Processing. 79, 4-6, p. 1493-1495 3 p.

研究成果: ジャーナルへの寄稿記事

Laser produced plasmas
laser plasmas
ultraviolet radiation
Light sources
light sources
3 引用 (Scopus)

Development of EUV light source by CO2 laser-produced plasma with nano-structured SnO2 targets

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 313-318 6 p., 49.

研究成果: ジャーナルへの寄稿Conference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
laser plasmas
Light sources
4 引用 (Scopus)

Development of EUV light source by CO2 laser-produced Xe plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 361-366 6 p., 57.

研究成果: ジャーナルへの寄稿Conference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
11 引用 (Scopus)

Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5448, PART 2, p. 737-748 12 p., 83.

研究成果: ジャーナルへの寄稿Conference article

Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
Light sources
33 引用 (Scopus)

Emission characteristics of extreme ultraviolet radiation from CO 2 laser-produced xenon plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 4 15 2004, : : Japanese Journal of Applied Physics, Part 2: Letters. 43, 4 B

研究成果: ジャーナルへの寄稿記事

extreme ultraviolet radiation
Laser produced plasmas
Xenon
laser plasmas
Ultraviolet radiation
2003

Spectral dynamics analysis of ultra-line-narrowed F2 laser

Kumazaki, T., Wakabayashi, O., Nohdomi, R., Ariga, T., Watanabe, H., Hotta, K., Mizoguchi, H., Tanaka, H., Takahashi, A. & Okada, T., 10 1 2003, : : Proceedings of SPIE - The International Society for Optical Engineering. 5040 III, p. 1363-1370 8 p.

研究成果: ジャーナルへの寄稿Conference article

Spectral Analysis
Dynamic Analysis
Dynamic analysis
Laser
Lasers
2 引用 (Scopus)

Spectral dynamics of narrow-band F2 laser for optical lithography

Tanaka, H., Takahashi, A., Okada, T., Ariga, T., Nohdomi, R., Hotta, K. & Mizoguchi, H., 7 1 2003, : : Applied Physics B: Lasers and Optics. 76, 7, p. 735-740 6 p.

研究成果: ジャーナルへの寄稿記事

narrowband
lithography
lasers
simulation
injection
2002
5 引用 (Scopus)

Production of laser-heated plasma in high-pressure Ar gas and emission characteristics of vacuum ultraviolet radiation from Ar2 excimers

Tanaka, H., Takahashi, A., Okada, T., Maeda, M., Uchino, K., Nishisaka, T., Sumitani, A. & Mizoguchi, H., 4 1 2002, : : Applied Physics B: Lasers and Optics. 74, 4-5, p. 323-326 4 p.

研究成果: ジャーナルへの寄稿記事

far ultraviolet radiation
TEA lasers
ultraviolet emission
excimers
laser plasmas