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研究成果 1982 2018

  • 495 引用
  • 10 h指数
  • 41 記事
  • 18 会議での発言
  • 7 Conference article
フィルター
Conference article
1991

Thomson scattering diagnostics of discharge plasmas in an excimer laser

Yamakoshi, H., Kato, M., Kubo, Y., Enokizono, H., Uchino, K., Muraoka, K., Takahashi, A. & Maeda, M., 1 1 1991, : : Proceedings of SPIE - The International Society for Optical Engineering. 1397, pt 1, p. 119-122 4 p.

研究成果: ジャーナルへの寄稿Conference article

Excimer Laser
Thomson scattering
Excimer lasers
excimer lasers
plasma jets
2003

Spectral dynamics analysis of ultra-line-narrowed F2 laser

Kumazaki, T., Wakabayashi, O., Nohdomi, R., Ariga, T., Watanabe, H., Hotta, K., Mizoguchi, H., Tanaka, H., Takahashi, A. & Okada, T., 10 1 2003, : : Proceedings of SPIE - The International Society for Optical Engineering. 5040 III, p. 1363-1370 8 p.

研究成果: ジャーナルへの寄稿Conference article

Spectral Analysis
Dynamic Analysis
Dynamic analysis
Laser
Lasers
2004
3 引用 (Scopus)

Development of EUV light source by CO2 laser-produced plasma with nano-structured SnO2 targets

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 313-318 6 p., 49.

研究成果: ジャーナルへの寄稿Conference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
laser plasmas
Light sources
4 引用 (Scopus)

Development of EUV light source by CO2 laser-produced Xe plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 361-366 6 p., 57.

研究成果: ジャーナルへの寄稿Conference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
11 引用 (Scopus)

Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5448, PART 2, p. 737-748 12 p., 83.

研究成果: ジャーナルへの寄稿Conference article

Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
Light sources
2008
5 引用 (Scopus)

Comparative study on EUV and debris emission from CO 2 and Nd: YAG laser-produced tin plasmas

Takahashi, A., Nakamura, D., Tamaru, K., Akiyama, T. & Okada, T., 6 12 2008, : : Journal of Physics: Conference Series. 112, Part 4, 042059.

研究成果: ジャーナルへの寄稿Conference article

debris
YAG lasers
tin
lithography
lasers
2009
4 引用 (Scopus)

Dynamics of debris from laser-irradiated Sn droplet for EUV lithography light source

Okazaki, K., Nakamura, D., Akiyama, T., Toya, K., Takahashi, A. & Okada, T., 5 25 2009, : : Proceedings of SPIE - The International Society for Optical Engineering. 7201, 72010T.

研究成果: ジャーナルへの寄稿Conference article

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
debris
Debris
Droplet