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研究成果 1982 2018

  • 495 引用
  • 10 h指数
  • 41 記事
  • 18 会議での発言
  • 7 Conference article
フィルター
Conference article
5 引用 (Scopus)

Comparative study on EUV and debris emission from CO 2 and Nd: YAG laser-produced tin plasmas

Takahashi, A., Nakamura, D., Tamaru, K., Akiyama, T. & Okada, T., 6 12 2008, : : Journal of Physics: Conference Series. 112, Part 4, 042059.

研究成果: ジャーナルへの寄稿Conference article

debris
YAG lasers
tin
lithography
lasers
3 引用 (Scopus)

Development of EUV light source by CO2 laser-produced plasma with nano-structured SnO2 targets

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 313-318 6 p., 49.

研究成果: ジャーナルへの寄稿Conference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
laser plasmas
Light sources
4 引用 (Scopus)

Development of EUV light source by CO2 laser-produced Xe plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 361-366 6 p., 57.

研究成果: ジャーナルへの寄稿Conference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
4 引用 (Scopus)

Dynamics of debris from laser-irradiated Sn droplet for EUV lithography light source

Okazaki, K., Nakamura, D., Akiyama, T., Toya, K., Takahashi, A. & Okada, T., 5 25 2009, : : Proceedings of SPIE - The International Society for Optical Engineering. 7201, 72010T.

研究成果: ジャーナルへの寄稿Conference article

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
debris
Debris
Droplet
11 引用 (Scopus)

Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., 12 1 2004, : : Proceedings of SPIE - The International Society for Optical Engineering. 5448, PART 2, p. 737-748 12 p., 83.

研究成果: ジャーナルへの寄稿Conference article

Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
Light sources

Spectral dynamics analysis of ultra-line-narrowed F2 laser

Kumazaki, T., Wakabayashi, O., Nohdomi, R., Ariga, T., Watanabe, H., Hotta, K., Mizoguchi, H., Tanaka, H., Takahashi, A. & Okada, T., 10 1 2003, : : Proceedings of SPIE - The International Society for Optical Engineering. 5040 III, p. 1363-1370 8 p.

研究成果: ジャーナルへの寄稿Conference article

Spectral Analysis
Dynamic Analysis
Dynamic analysis
Laser
Lasers

Thomson scattering diagnostics of discharge plasmas in an excimer laser

Yamakoshi, H., Kato, M., Kubo, Y., Enokizono, H., Uchino, K., Muraoka, K., Takahashi, A. & Maeda, M., 1 1 1991, : : Proceedings of SPIE - The International Society for Optical Engineering. 1397, pt 1, p. 119-122 4 p.

研究成果: ジャーナルへの寄稿Conference article

Excimer Laser
Thomson scattering
Excimer lasers
excimer lasers
plasma jets