Pureに変更を加えた場合、すぐここに表示されます。

研究成果 2000 2018

  • 1141 引用
  • 15 h指数
  • 84 記事
  • 28 会議での発言
  • 15 Conference article
2014
12 引用 (Scopus)

Synthesis and characterization of ZnInON semiconductor: A ZnO-based compound with tunable band gap

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K. & Shiratani, M., 9 2014, : : Materials Research Express. 1, 3, 036405.

研究成果: ジャーナルへの寄稿記事

Energy gap
Semiconductor materials
Quartz
Photosensitivity
Full width at half maximum
7 引用 (Scopus)

Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Shiratani, M., Koga, K., Kamataki, K., Iwashita, S., Uchida, G., Seo, H. & Itagaki, N., 1 1 2014, : : Japanese journal of applied physics. 53, 1, 010201.

研究成果: ジャーナルへの寄稿記事

Nanoparticles
Plasmas
nanoparticles
nanofabrication
Nanostructures
2013
28 引用 (Scopus)

Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 4 15 2013, : : Electrochimica Acta. 95, p. 43-47 5 p.

研究成果: ジャーナルへの寄稿記事

Polysulfides
Electrolytes
Semiconductor quantum dots
Redox reactions
Solar cells
3 引用 (Scopus)

Characteristics of crystalline silicon/Si quantum dot/poly(3,4- ethylenedioxythiophene) hybrid solar cells

Uchida, G., Wang, Y., Ichida, D., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 11 1 2013, : : Japanese journal of applied physics. 52, 11 PART 2, 11NA05.

研究成果: ジャーナルへの寄稿記事

Semiconductor quantum dots
Solar cells
solar cells
quantum dots
Crystalline materials
8 引用 (Scopus)

Characteristics of photocurrent generation in the near-ultraviolet region in Si quantum-dot sensitized solar cells

Uchida, G., Sato, M., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 10 1 2013, : : Thin Solid Films. 544, p. 93-98 6 p.

研究成果: ジャーナルへの寄稿記事

Photocurrents
Semiconductor quantum dots
photocurrents
Solar cells
solar cells
18 引用 (Scopus)

Characterization of the energy flux toward the substrate during magnetron sputter deposition of ZnO thin films

Bornholdt, S., Itagaki, N., Kuwahara, K., Wulff, H., Shiratani, M. & Kersten, H., 4 1 2013, : : Plasma Sources Science and Technology. 22, 2, 025019.

研究成果: ジャーナルへの寄稿記事

thin films
probes
charge carriers
ion impact
energy
4 引用 (Scopus)

Correlation between volume fraction of silicon clusters in amorphous silicon films and optical emission properties of Si* and SiH*

Kim, Y., Hatozaki, K., Hashimoto, Y., Uchida, G., Kamataki, K., Itagaki, N., Seo, H., Koga, K. & Shiratani, M., 11 1 2013, : : Japanese journal of applied physics. 52, 11 PART 2, 11NA07.

研究成果: ジャーナルへの寄稿記事

silicon films
Amorphous silicon
amorphous silicon
light emission
Volume fraction
3 引用 (Scopus)

Discharge power dependence of carbon dust flux in a divertor simulator

Nishiyama, K., Morita, Y., Uchida, G., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Koga, K., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K., Sagara, A., Bornholdt, S. & Kersten, H., 1 1 2013, : : Journal of Nuclear Materials. 438, SUPPL

研究成果: ジャーナルへの寄稿記事

simulators
Dust
Carbon
Simulators
dust
6 引用 (Scopus)

Dust particle formation due to interaction between graphite and helicon deuterium plasmas

Iwashita, S., Nishiyama, K., Uchida, G., Seo, H., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2013, : : Fusion Engineering and Design. 88, 1, p. 28-32 5 p.

研究成果: ジャーナルへの寄稿記事

Helicons
Graphite
Deuterium
Beam plasma interactions
Particles (particulate matter)
3 引用 (Scopus)

Effects of DC substrate bias voltage on dust flux in the Large Helical Device

Koga, K., Nishiyama, K., Morita, Y., Uchida, G., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., 1 1 2013, : : Journal of Nuclear Materials. 438, SUPPL

研究成果: ジャーナルへの寄稿記事

Bias voltage
Dust
dust
direct current
Fluxes
10 引用 (Scopus)

Effects of hydrogen dilution on ZnO thin films fabricated via nitrogen-mediated crystallization

Suhariadi, I., Matsushima, K., Kuwahara, K., Oshikawa, K., Yamashita, D., Seo, H., Uchida, G., Kamataki, K., Koga, K., Shiratani, M., Bornholdt, S., Kersten, H., Wulff, H. & Itagaki, N., 1 1 2013, : : Japanese journal of applied physics. 52, 1 PART2, 01AC08.

研究成果: ジャーナルへの寄稿記事

Dilution
dilution
Crystallization
crystallization
Nitrogen

Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD

Kim, Y., Matsunaga, T., Nakahara, K., Seo, H., Kamataki, K., Uchida, G., Itagaki, N., Koga, K. & Shiratani, M., 8 15 2013, : : Surface and Coatings Technology. 228, SUPPL.1

研究成果: ジャーナルへの寄稿記事

Plasma CVD
plasma jets
hollow
vapor deposition
Nanoparticles
12 引用 (Scopus)

Effects of nitrogen on crystal growth of sputter-deposited ZnO films for transparent conducting oxide

Suhariadi, I., Oshikawa, K., Kuwahara, K., Matsushima, K., Yamashita, D., Uchida, G., Koga, K., Shiratani, M. & Itagaki, N., 11 1 2013, : : Japanese Journal of Applied Physics. 52, 11 PART 2, 11NB03.

研究成果: ジャーナルへの寄稿記事

Crystal growth
crystal growth
Nitrogen
nitrogen
conduction
11 引用 (Scopus)

Epitaxial growth of ZnInON films with tunable band gap from 1.7 to 3.3 eV on ZnO templates

Matsushima, K., Hirose, T., Kuwahara, K., Yamashita, D., Uchida, G., Seo, H., Kamataki, K., Koga, K., Shiratani, M. & Itagaki, N., 11 1 2013, : : Japanese Journal of Applied Physics. 52, 11 PART 2, 11NM06.

研究成果: ジャーナルへの寄稿記事

Epitaxial growth
Energy gap
templates
Crystallization
Nitrogen
2 引用 (Scopus)

Flux control of carbon nanoparticles generated due to interactions between hydrogen plasmas and graphite using DC-biased substrates

Koga, K., Tateishi, M., Nishiyama, K., Uchida, G., Kamataki, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., 11 1 2013, : : Japanese journal of applied physics. 52, 11 PART 2, 11NA08.

研究成果: ジャーナルへの寄稿記事

Beam plasma interactions
hydrogen plasma
Dust
Graphite
graphite

Growth control of ZnO nano-rod with various seeds and photovoltaic application

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2013, : : Journal of Physics: Conference Series. 441, 1, 012029.

研究成果: ジャーナルへの寄稿Conference article

seeds
rods
electron transfer
baths
solar cells
8 引用 (Scopus)

High amount cluster incorporation in initial Si film deposition by SiH 4 plasma chemical vapor deposition

Kim, Y., Hatozaki, K., Hashimoto, Y., Uchida, G., Kamataki, K., Itagaki, N., Seo, H., Koga, K. & Shiratani, M., 1 1 2013, : : Japanese journal of applied physics. 52, 1 PART2, 01AD01.

研究成果: ジャーナルへの寄稿記事

Chemical vapor deposition
Volume fraction
vapor deposition
Plasmas
Quartz crystal microbalances
8 引用 (Scopus)

Improvement of Si adhesion and reduction of electron recombination for Si quantum dot-sensitized solar cells

Seo, H., Wang, Y., Sato, M., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2013, : : Japanese Journal of Applied Physics. 52, 1 PART2, 01AD05.

研究成果: ジャーナルへの寄稿記事

electron recombination
Semiconductor quantum dots
Solar cells
adhesion
Adhesion
7 引用 (Scopus)

Improvement on the electron transfer of dye-sensitized solar cell using vanadium doped TiO2

Seo, H., Wang, Y., Ichida, D., Uchida, G., Itagaki, N., Koga, K., Shiratani, M., Nam, S. H. & Boo, J. H., 11 1 2013, : : Japanese journal of applied physics. 52, 11 PART 2, 11NM02.

研究成果: ジャーナルへの寄稿記事

Vanadium
vanadium
electron transfer
solar cells
dyes
32 引用 (Scopus)

Model for thickness dependence of mobility and concentration in highly conductive zinc oxide

Look, D. C., Kevin, D. L., Arnold Kiefer, K., Bruce Claflin, C., Itagaki, N., Matsushima, K. & Surhariadi, I., 1 1 2013, : : Optical Engineering. 52, 3, 033801.

研究成果: ジャーナルへの寄稿記事

Zinc oxide
zinc oxides
plots
Aluminum
Electron scattering
2 引用 (Scopus)

Model for thickness dependence of mobility and concentration in highly conductive ZnO

Look, D. C., Leedy, K. D., Kiefer, A., Claflin, B., Itagaki, N., Matsushima, K. & Surhariadi, I., 5 30 2013, Oxide-Based Materials and Devices IV. 巻 8626. 862602

研究成果: 著書/レポートタイプへの貢献会議での発言

Quartz
Electron scattering
Reflectometers
Buffer layers
Carrier concentration
11 引用 (Scopus)

Study on the fabrication of paint-type Si quantum dot-sensitized solar cells

Seo, H., Son, M. K., Kim, H. J., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 11 11 2013, : : Japanese journal of applied physics. 52, 10 PART2, 10MB07.

研究成果: ジャーナルへの寄稿記事

paints
Paint
Semiconductor quantum dots
Solar cells
solar cells
5 引用 (Scopus)

The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si

Seo, H., Wang, Y., Sato, M., Uchida, G., Koga, K., Itagaki, N., Kamataki, K. & Shiratani, M., 11 1 2013, : : Thin Solid Films. 546, p. 284-288 5 p.

研究成果: ジャーナルへの寄稿記事

Semiconductor quantum dots
Solar cells
solar cells
quantum dots
Excitons
19 引用 (Scopus)
Semiconductor quantum dots
Surface treatment
Solar cells
Excitons
Electrolytes
2012

Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition

Shiratani, M., Hatozaki, K., Hashimoto, Y., Kim, Y., Seo, H., Kamataki, K., Uchida, G., Itagaki, N. & Koga, K., 11 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 377-382 6 p. (Materials Research Society Symposium Proceedings; 巻数 1426).

研究成果: 著書/レポートタイプへの貢献会議での発言

filters
soaking
cells
Amorphous silicon
amorphous silicon
12 引用 (Scopus)

Combinatorial deposition of microcrystalline silicon films using multihollow discharge plasma chemical vapor deposition

Koga, K., Matsunaga, T., Kim, Y., Nakahara, K., Yamashita, D., Matsuzaki, H., Kamataki, K., Uchida, G., Itagaki, N. & Shiratani, M., 1 1 2012, : : Japanese Journal of Applied Physics. 51, 1 PART 2, 01AD02.

研究成果: ジャーナルへの寄稿記事

Microcrystalline silicon
silicon films
plasma jets
Chemical vapor deposition
vapor deposition
5 引用 (Scopus)

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kamataki, K., Koga, K., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., 11 15 2012, : : Thin Solid Films. 523, p. 76-79 4 p.

研究成果: ジャーナルへの寄稿記事

radio frequency discharge
Amplitude modulation
Plasmas
Electric potential
electric potential

Deposition of cluster-free b-doped hydrogenated amorphous silicon films using sih 4+b10h1 4 multi-hollow discharge plasma chemical vapor deposition

Koga, K., Nakahara, K., Kim, Y. W., Matsunaga, T., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N. & Shiratani, M., 1 1 2012, : : Japanese Journal of Applied Physics. 51, 1 PART 2, 01AD03.

研究成果: ジャーナルへの寄稿記事

silicon films
Amorphous silicon
plasma jets
amorphous silicon
Chemical vapor deposition
15 引用 (Scopus)

Effect of nitridation of si nanoparticles on the performance of quantum-dot sensitized solar cells

Uchida, G., Yamamoto, K., Sato, M., Kawashima, Y., Nakahara, K., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2012, : : Japanese journal of applied physics. 51, 1 PART 2, 01AD01.

研究成果: ジャーナルへの寄稿記事

Nitridation
Semiconductor quantum dots
Solar cells
solar cells
quantum dots
4 引用 (Scopus)

Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma chemical vapor deposition

Kim, Y., Matsunaga, T., Nakahara, K., Uchida, G., Kamataki, K., Itagaki, N., Seo, H., Koga, K. & Shiratani, M., 11 15 2012, : : Thin Solid Films. 523, p. 29-33 5 p.

研究成果: ジャーナルへの寄稿記事

Microcrystalline silicon
silicon films
Chemical vapor deposition
vapor deposition
Nanoparticles
26 引用 (Scopus)

High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers

Kuwahara, K., Itagaki, N., Nakahara, K., Yamashita, D., Uchida, G., Kamataki, K., Koga, K. & Shiratani, M., 5 1 2012, : : Thin Solid Films. 520, 14, p. 4674-4677 4 p.

研究成果: ジャーナルへの寄稿記事

Epitaxial films
Buffer layers
solid phases
buffers
Aluminum Oxide
8 引用 (Scopus)
Light Scattering
Light scattering
Nanoparticles
light scattering
Plasma
8 引用 (Scopus)

In-situ measurements of cluster volume fraction in silicon thin films using quartz crystal microbalances

Kim, Y., Hatozaki, K., Hashimoto, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 11 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 307-311 5 p. (Materials Research Society Symposium Proceedings; 巻数 1426).

研究成果: 著書/レポートタイプへの貢献会議での発言

Quartz crystal microbalances
Silicon
in situ measurement
quartz crystals
microbalances

Investigations on the energy balance of the substrate during ZnO magnetron sputtering

Bornholdt, S., Kuwahara, K., Itagaki, N., Wulff, H., Shiratani, M. & Kersten, H., 12 1 2012, 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. p. 1038-1041 4 p. (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics; 巻数 2).

研究成果: 著書/レポートタイプへの貢献会議での発言

14 引用 (Scopus)

Novel fabrication method for ZnO films via nitrogen-mediated crystallization

Itagaki, N., Kuwahara, K., Matsushima, K. & Oshikawa, K., 3 23 2012, Oxide-Based Materials and Devices III. 826306. (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 8263).

研究成果: 著書/レポートタイプへの貢献会議での発言

Crystallization
Nitrogen
Fabrication
crystallization
nitrogen
6 引用 (Scopus)

Novel fabrication method of ZnO films utilizing solid-phase crystallized seed layers

Itagaki, N. & Kuwahara, K., 1 1 2012, Transparent Conducting Oxides and Applications. p. 15-20 6 p. (Materials Research Society Symposium Proceedings; 巻数 1315).

研究成果: 著書/レポートタイプへの貢献会議での発言

Seed
solid phases
seeds
Fabrication
fabrication
2 引用 (Scopus)

The optical analysis and application of size-controllable Si quantum dots fabricated by multi-hollow discharge plasma chemical vapor deposition

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 11 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 313-318 6 p. (Materials Research Society Symposium Proceedings; 巻数 1426).

研究成果: 著書/レポートタイプへの貢献会議での発言

plasma jets
Semiconductor quantum dots
Chemical vapor deposition
hollow
Solar cells
2011
8 引用 (Scopus)

Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film

Koga, K., Matsunaga, T., Nakamura, W. M., Nakahara, K., Kawashima, Y., Uchida, G., Kamataki, K., Itagaki, N. & Shiratani, M., 8 1 2011, : : Thin Solid Films. 519, 20, p. 6896-6898 3 p.

研究成果: ジャーナルへの寄稿記事

Silicon
Nanoparticles
Crystalline materials
Thin films
nanoparticles
2 引用 (Scopus)

Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD

Koga, K., Nakahara, K., Kim, Y. W., Kawashima, Y., Matsunaga, T., Sato, M., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N. & Shiratani, M., 10 1 2011, : : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 10, p. 3013-3016 4 p.

研究成果: ジャーナルへの寄稿記事

plasma jets
hollow
vapor deposition
surface reactions
defects

Generation and surface modification of Si nano-particles using SiH 4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics

Koga, K., Uchida, G., Yamamoto, K., Sato, M., Kawashima, Y., Kamataki, K., Itagaki, N. & Shiratani, M., 12 29 2011, International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. p. 27-30 4 p. (AIP Conference Proceedings; 巻数 1393).

研究成果: 著書/レポートタイプへの貢献会議での発言

hollow
silicon
plasma jets
excitons
composite materials
53 引用 (Scopus)

Highly conducting and very thin ZnO: AI films with ZnO buffer layer fabricated by solid phase crystallization from amorphous phase

Itagaki, N., Kuwahara, K., Nakahara, K., Yamashita, D., Uchida, G., Koga, K. & Shiratani, M., 1 2011, : : Applied Physics Express. 4, 1, 011101.

研究成果: ジャーナルへの寄稿記事

Buffer layers
solid phases
buffers
Crystallization
crystallization
7 引用 (Scopus)

Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye

Uchida, G., Kawashima, Y., Yamamoto, K., Sato, M., Nakahara, K., Matsunaga, T., Yamashita, D., Matsuzaki, H., Kamataki, K., Itagaki, N., Koga, K., Kondo, M. & Shiratani, M., 10 1 2011, : : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 10, p. 3021-3024 4 p.

研究成果: ジャーナルへの寄稿記事

ruthenium
solar cells
dyes
nanoparticles
silicon
10 引用 (Scopus)

Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

Kamataki, K., Miyata, H., Koga, K., Uchida, G., Itagaki, N. & Shiratani, M., 10 1 2011, : : Applied Physics Express. 4, 10, 105001.

研究成果: ジャーナルへの寄稿記事

Amplitude modulation
Nanoparticles
Plasmas
nanoparticles
Electric potential
24 引用 (Scopus)

Nano-factories in plasma: Present status and outlook

Shiratani, M., Koga, K., Iwashita, S., Uchida, G., Itagaki, N. & Kamataki, K., 5 4 2011, : : Journal of Physics D: Applied Physics. 44, 17, 174038.

研究成果: ジャーナルへの寄稿記事

industrial plants
Industrial plants
Plasmas
Substrates
agglomeration

Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers

Itagaki, N., Kuwahara, K. & Nakahara, K., 12 29 2011, International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. p. 23-26 4 p. (AIP Conference Proceedings; 巻数 1393).

研究成果: 著書/レポートタイプへの貢献会議での発言

oxide films
solid phases
seeds
conduction
fabrication
15 引用 (Scopus)

Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD

Uchida, G., Yamamoto, K., Kawashima, Y., Sato, M., Nakahara, K., Kamataki, K., Itagaki, N., Koga, K., Kondo, M. & Shiratani, M., 10 1 2011, : : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 10, p. 3017-3020 4 p.

研究成果: ジャーナルへの寄稿記事

plasma jets
hollow
vapor deposition
silicon
photoluminescence
2010

Cluster-free B-doped a-Si:H films deposited using SiH4 + B 10H14 multi-hollow discharges

Nakahara, K., Kawashima, Y., Sato, M., Matsunaga, T., Yamamoto, K., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Itagaki, N., Koga, K. & Shiratani, M., 12 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2216-2218 3 p. 5686686

研究成果: 著書/レポートタイプへの貢献会議での発言

Deposition rates
Plasma CVD
Optical band gaps
Surface reactions
Flow of gases
1 引用 (Scopus)

Deposition of cluster-free P-doped A-Si:H films using a multi-hollow discharge plasma CVD method

Nakahara, K., Kawashima, Y., Sato, M., Matsunaga, T., Yamamoto, K., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 12 20 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 3722-3725 4 p. 5616514. (Conference Record of the IEEE Photovoltaic Specialists Conference).

研究成果: 著書/レポートタイプへの貢献会議での発言

Plasma CVD
Deposition rates
Flow of gases
Flow rate
Defect density

Deposition profiles of microcrystalline silicon films using multi-hollow discharge plasma CVD

Matsunaga, T., Kawashima, Y., Koga, K., Nakahara, K., Nakamura, W. M., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., 12 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2219-2221 3 p. 5686679. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

研究成果: 著書/レポートタイプへの貢献会議での発言

Plasma CVD
Microcrystalline silicon
Crystalline materials
Silicon
Substrates
1 引用 (Scopus)

Effects of amplitude modulation of rf discharge voltage on growth of nano-particles in reactive plasmas

Kamataki, K., Miyata, H., Koga, K., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1943-1947 5 p. 5686456

研究成果: 著書/レポートタイプへの貢献会議での発言

Amplitude modulation
Plasmas
Electric potential
Plasma CVD