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研究成果 2000 2018

  • 1134 引用
  • 15 h指数
  • 84 記事
  • 28 会議での発言
  • 15 Conference article
フィルター
Conference article
2018

Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method

Suhariadi, I., Shiratani, M. & Itagaki, N., 3 30 2018, : : MATEC Web of Conferences. 159, 02031.

研究成果: ジャーナルへの寄稿Conference article

Crystallization
Nitrogen
Thin films
Fractals
Surface morphology
2015

Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering

Ide, T., Matsushima, K., Shimizu, R., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., 1 1 2015, : : Materials Research Society Symposium Proceedings. 1741, January, p. 41-46 6 p.

研究成果: ジャーナルへの寄稿Conference article

Aluminum Oxide
Buffer layers
Epitaxial growth
Sapphire
Magnetron sputtering
1 引用 (Scopus)

Fabrication of p-i-n solar cells utilizing ZnlnON by RF magnetron sputtering

Matsushima, K., Shimizu, R., Ide, T., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., 1 1 2015, : : Materials Research Society Symposium Proceedings. 1741, January, p. 53-57 5 p.

研究成果: ジャーナルへの寄稿Conference article

Magnetron sputtering
Solar cells
magnetron sputtering
solar cells
Fabrication
2014

Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator

Tateishi, M., Koga, K., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., 1 1 2014, : : Journal of Physics: Conference Series. 518, 1, 012009.

研究成果: ジャーナルへの寄稿Conference article

plasma etching
simulators
dust
profiles
flakes
1 引用 (Scopus)

Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD

Toko, S., Hashimoto, Y., Kanemitu, Y., Torigoe, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2014, : : Journal of Physics: Conference Series. 518, 1, 012008.

研究成果: ジャーナルへの寄稿Conference article

vapor deposition
grids
plasma jets
hollow
direct current
3 引用 (Scopus)

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method

Ichida, D., Uchida, G., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2014, : : Journal of Physics: Conference Series. 518, 1, 012002.

研究成果: ジャーナルへの寄稿Conference article

magnetron sputtering
nanoparticles
frequency shift
gas mixtures
crystallinity
3 引用 (Scopus)

Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Hashimoto, Y., Toko, S., Yamashita, D., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2014, : : Journal of Physics: Conference Series. 518, 1, 012007.

研究成果: ジャーナルへの寄稿Conference article

filters
film thickness
amorphous silicon
nanoparticles
hydrogen
1 引用 (Scopus)

Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

Dong, X., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., 1 1 2014, : : Journal of Physics: Conference Series. 518, 1, 012010.

研究成果: ジャーナルへの寄稿Conference article

magnetohydrodynamic flow
pressure dependence
flow velocity
spectroscopy
toluene
3 引用 (Scopus)

Plasma etching of single fine particle trapped in Ar plasma by optical tweezers

Ito, T., Koga, K., Yamashita, D., Kamataki, K., Itagaki, N., Uchida, G. & Shiratani, M., 1 1 2014, : : Journal of Physics: Conference Series. 518, 1, 012014.

研究成果: ジャーナルへの寄稿Conference article

trapped particles
plasma etching
plasma sheaths
interactions
infrared lasers
1 引用 (Scopus)

SiC nanoparticle composite anode for Li-Ion batteries

Shiratani, M., Kamataki, K., Uchida, G., Koga, K., Seo, H., Itagaki, N. & Ishihara, T., 1 1 2014, : : Materials Research Society Symposium Proceedings. 1678

研究成果: ジャーナルへの寄稿Conference article

electric batteries
Anodes
anodes
Nanoparticles
nanoparticles
2013

Growth control of ZnO nano-rod with various seeds and photovoltaic application

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 1 1 2013, : : Journal of Physics: Conference Series. 441, 1, 012029.

研究成果: ジャーナルへの寄稿Conference article

seeds
rods
electron transfer
baths
solar cells
2004
1 引用 (Scopus)

Control of the electron temperature by varying the resonance zone width in ECR plasma

Itagaki, N., Muta, H., Ishii, N. & Kawai, Y., 6 1 2004, : : Thin Solid Films. 457, 1, p. 59-63 5 p.

研究成果: ジャーナルへの寄稿Conference article

Electron temperature
Microwaves
electron energy
Magnetic fields
Plasmas
41 引用 (Scopus)

High-rate growth of microcrystalline silicon films using a high-density SiH4/H2 glow-discharge plasma

Niikura, C., Itagaki, N., Kondo, M., Kawai, Y. & Matsuda, A., 6 1 2004, : : Thin Solid Films. 457, 1, p. 84-89 6 p.

研究成果: ジャーナルへの寄稿Conference article

Microcrystalline silicon
Glow discharges
silicon films
glow discharges
Cathodes
2003
46 引用 (Scopus)

Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma

Itagaki, N., Iwata, S., Muta, K., Yonesu, A., Kawakami, S., Ishii, N. & Kawai, Y., 7 1 2003, : : Thin Solid Films. 435, 1-2, p. 259-263 5 p.

研究成果: ジャーナルへの寄稿Conference article

Electron temperature
Nitrogen
dissociation
electron energy
Plasmas
2001
5 引用 (Scopus)

Investigation of ECR plasma uniformity from the point of view of production and confinement

Itagaki, N., Yoshizawa, T., Ueda, Y. & Kawai, Y., 5 15 2001, : : Thin Solid Films. 386, 2, p. 152-159 8 p.

研究成果: ジャーナルへの寄稿Conference article

Electron cyclotron resonance
electron cyclotron resonance
Plasmas
Refraction
refraction