Hirao, A.,
Tottori, N.,
Yokomori, M.,
Tagawa, M.,
Sugano, S. S.,
Sakuma, S. &
Yamanishi, Y.,
1月 25 2021,
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc.,
p. 168-171 4 p. 9375180. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2021-January).
研究成果: 書籍/レポート タイプへの寄稿 › 会議への寄与