Yamashita, Y.,
Basaki, N.,
Sakuma, S. &
Yamanishi, Y.,
6月 20 2021,
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc.,
p. 529-532 4 p. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).
研究成果: 書籍/レポート タイプへの寄稿 › 会議への寄与