抄録
A low fluence UV laser ablation technique combined with Laser-Induced Fluorescence (LIF) spectroscopy is developed for an extreme trace element analysis of solid surface with a nanometer-scale depth resolution. Since the behavior of scattering atoms by the laser ablation was significant for improving the sensitivity of the analysis, the spatial distributions of the scattering atoms were investigated by a two dimensional imaging LIF spectroscopy method. Influences of a buffer gas and an assist mask on the atomic distributions were also investigated for enhancing the sensitivity of the analysis.
| 寄稿の翻訳タイトル | Diagnostics of Scattering Atoms for High Sensitive Spectroscopy Using Low-Fluence Laser Ablation |
|---|---|
| 本文言語 | 日本語 |
| ページ（範囲） | 206-210 |
| ページ数 | 5 |
| ジャーナル | レーザー研究 |
| 巻 | 36 |
| 号 | 4 |
| DOI | |
| 出版ステータス | 出版済み - 4月 15 2008 |