120 × 90 element thermoelectric infrared focal plane array with precisely patterned Au-black absorber

M. Hirota, Y. Nakajima, M. Saito, M. Uchiyama

研究成果: Contribution to journalArticle査読

45 被引用数 (Scopus)

抄録

This paper presents a 120 × 90 element thermoelectric infrared focal plane array with a precisely patterned Au-black absorber that provides high responsivity and a low cost potential. The device has a responsivity of 3900 V/W. The overall chip size is 14.4 mm × 11.0 mm with a 12.0 mm × 9.0 mm imaging area. Each detector consists of two pairs of p-n polysilicon thermocouples and has external dimensions of 100 μm × 100 μm and internal electrical resistance of 90 kΩ. The precisely patterned Au-black infrared absorbing layer was achieved by both a low-pressure vapor deposition technique and a lift-off technique utilizing a PSG sacrificial layer. These techniques make it possible to obtain a Au-black pattern with the same degree of accuracy as with the CMOS process. The Au-black layer showed high absorptance of more than 90% to the light source with a wavelength of from 8 to 13 μm. This performance is suitable for automotive applications as well as consumer electronics.

本文言語英語
ページ(範囲)146-151
ページ数6
ジャーナルSensors and Actuators, A: Physical
135
1
DOI
出版ステータス出版済み - 3 30 2007
外部発表はい

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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