120×90 element thermopile array fabricated with CMOS technology

masaki Hirota, Yasushi Nakajima, Masanori Saito, Fuminori Satou, Makato Uchiyama

研究成果: ジャーナルへの寄稿記事

13 引用 (Scopus)

抄録

This paper presents the first-ever 120 × 90 element thermoelectric infrared focal plane array (FPA) fabricated with CMOS technology. The device has a high responsivity of 3,900 V/W and a low cost potential. The overall chip size is 14.4 mm × 11.0 mm with a 12.0 mm × 9.0 mm imaging area. The device structure was optimized for a vacuum-sealed package. Each detector consists of two pairs of p-n polysilicon thermocouples and an NMOS transistor and has external dimensions of 100 μm × 100 μm and an internal electrical resistance of 90 kΩ. The precisely patterned Au-black infrared absorbing layer was achieved by both a low-pressure vapor deposition technique and a lift-off technique utilizing a PSG sacrificial layer. These techniques make it possible to obtain a Au-black pattern with the same degree of accuracy as with the CMOS process. The Au-black layer showed high absorptivity of more than 90 % to the light source with a wavelength of from 8 to 13 μm. This performance is suitable for consumer electronics as well as automotive applications.

元の言語英語
ページ(範囲)239-249
ページ数11
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
4820
発行部数1
DOI
出版物ステータス出版済み - 12 1 2002
外部発表Yes

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Thermopiles
thermopiles
CMOS
Infrared radiation
Vapor deposition
Acoustic impedance
Focal plane arrays
Consumer electronics
Thermocouples
Polysilicon
Light sources
Transistors
Vacuum
focal plane devices
thermocouples
electrical resistance
Detectors
Imaging techniques
Infrared Focal Plane Array
Wavelength

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

これを引用

120×90 element thermopile array fabricated with CMOS technology. / Hirota, masaki; Nakajima, Yasushi; Saito, Masanori; Satou, Fuminori; Uchiyama, Makato.

:: Proceedings of SPIE - The International Society for Optical Engineering, 巻 4820, 番号 1, 01.12.2002, p. 239-249.

研究成果: ジャーナルへの寄稿記事

Hirota, masaki ; Nakajima, Yasushi ; Saito, Masanori ; Satou, Fuminori ; Uchiyama, Makato. / 120×90 element thermopile array fabricated with CMOS technology. :: Proceedings of SPIE - The International Society for Optical Engineering. 2002 ; 巻 4820, 番号 1. pp. 239-249.
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