3-D conical microchannel fabricated by wet etching using Ti/Au sacrificial layer

Hirotaka Sugiura, Shinya Sakuma, Fumihito Arai

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We propose a method to fabricate conical microchannel in the glass microfluidic chip. The method is based on wet etching technique with different undercut ratio of the mask materials. By using this technique, we can fabricate the microchannel having the conical nozzle functions. The fabricated structure had highly reproducible shape. In addition, the process itself was relatively easy. The key point was to prepare an optimal sacrificial layer fabricated of Ti/Au alloy with a certain condition. The fabricated conical nozzle were utilized to transported cells smoothly from the bold channel to the narrow channel. This was because the conical nozzle had a preferable flow profiles to center cells on the cross section of the channel by the lifting force. This technology solves the problem of cell clogging at the entrance of narrow microchannel.

本文言語英語
ホスト出版物のタイトル22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
出版社Chemical and Biological Microsystems Society
ページ525-527
ページ数3
ISBN(電子版)9781510897571
出版ステータス出版済み - 2018
外部発表はい
イベント22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, 台湾省、中華民国
継続期間: 11 11 201811 15 2018

出版物シリーズ

名前22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
1

会議

会議22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Country台湾省、中華民国
CityKaohsiung
Period11/11/1811/15/18

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Bioengineering
  • Chemical Engineering (miscellaneous)
  • Control and Systems Engineering

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