3D global analysis of CZ-Si growth in a transverse magnetic field with rotating crucible and crystal

Lijun Liu, Koichi Kakimoto

研究成果: Contribution to journalArticle査読

24 被引用数 (Scopus)

抄録

Three-dimensional global simulations were carried out for a small Czochralski furnace for silicon crystal growth with a recently developed global model. The furnace is placed in a transverse magnetic field with rotating crucible and crystal. The convective, conductive and radiative heat transfers in the entire furnace were solved in a three-dimensionally conjugated way. Three-dimensional distributions of temperature and velocity were analyzed. The melt-crystal interface was found to have nearly rotational symmetry, and the azimuthal non-uniformity of temperature is much weaker on the crystal and crucible sidewalls in the case of high rotation rates of crucible and crystal than in the case of non-rotating crucible and crystal.

本文言語英語
ページ(範囲)347-351
ページ数5
ジャーナルCrystal Research and Technology
40
4-5
DOI
出版ステータス出版済み - 4 2005

All Science Journal Classification (ASJC) codes

  • 化学 (全般)
  • 材料科学(全般)
  • 凝縮系物理学

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