3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography

We demonstrated the fabrication of 3D nano-architectures composed of ultrathin TiO₂-gel (titania) layers. Titania films with a thickness of a few tens nanometers are prepared on lithographically-fabricated line and hole patterns by the surface sol-gel process. Oxygen plasma treatment is employed to remove the template moiety, and gives positive replicas of the template structures.