6.3 eV duv generation based on microchip Nd: YAG laser

Yuji Oki, Takashi Ohe, Hiroaki Yoshioka, Koji Kosaka, Takaaki Kanemaru

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

Deep ultraviolet light source using passively Q-switch Nd:YAG laser was proposed and designed for soft laser ablation on scanning electron microscopic application. Design wavelength is from 193 nm to 196.7 nm that exceeds 6.3 eV in photon energy for chemical dissociation of organic sample. Frequency mixing of 4th harmonic beam and optical parametric generated red beam are adopted by using flux-less BBO crystal. Initial design of BBO and PPLN-OPG has been performed.

本文言語英語
ホスト出版物のタイトルLaser Ignition Conference, LIC 2017
出版社OSA - The Optical Society
ISBN(電子版)9781557528209
DOI
出版ステータス出版済み - 1 1 2017
イベントLaser Ignition Conference, LIC 2017 - Bucharest, ルーマニア
継続期間: 7 20 20177 23 2017

出版物シリーズ

名前Optics InfoBase Conference Papers
Part F67-LIC 2017

会議

会議Laser Ignition Conference, LIC 2017
Countryルーマニア
CityBucharest
Period7/20/177/23/17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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