A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources

Kentaro Tomita, Kazuki Nakayama, Kazuya Inoue, Atsushi Sunahara, Kiichiro Uchino

研究成果: ジャーナルへの寄稿記事

7 引用 (Scopus)

抄録

To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024{1025m -3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

元の言語英語
記事番号076101
ジャーナルApplied Physics Express
6
発行部数7
DOI
出版物ステータス出版済み - 7 1 2013

Fingerprint

Laser produced plasmas
Thomson scattering
laser plasmas
ultraviolet radiation
Light sources
light sources
Scattering
Plasmas
Lasers
lasers
carbon lasers
Electron temperature
Tin
Carrier concentration
tin
electron energy
Carbon
Ultraviolet Rays
Temperature
temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources. / Tomita, Kentaro; Nakayama, Kazuki; Inoue, Kazuya; Sunahara, Atsushi; Uchino, Kiichiro.

:: Applied Physics Express, 巻 6, 番号 7, 076101, 01.07.2013.

研究成果: ジャーナルへの寄稿記事

@article{c9b55f51607c4ca590236a1d917a1aa6,
title = "A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources",
abstract = "To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024{1025m -3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10{\%}. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.",
author = "Kentaro Tomita and Kazuki Nakayama and Kazuya Inoue and Atsushi Sunahara and Kiichiro Uchino",
year = "2013",
month = "7",
day = "1",
doi = "10.7567/APEX.6.076101",
language = "English",
volume = "6",
journal = "Applied Physics Express",
issn = "1882-0778",
publisher = "Japan Society of Applied Physics",
number = "7",

}

TY - JOUR

T1 - A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources

AU - Tomita, Kentaro

AU - Nakayama, Kazuki

AU - Inoue, Kazuya

AU - Sunahara, Atsushi

AU - Uchino, Kiichiro

PY - 2013/7/1

Y1 - 2013/7/1

N2 - To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024{1025m -3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

AB - To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024{1025m -3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

UR - http://www.scopus.com/inward/record.url?scp=84880774206&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84880774206&partnerID=8YFLogxK

U2 - 10.7567/APEX.6.076101

DO - 10.7567/APEX.6.076101

M3 - Article

AN - SCOPUS:84880774206

VL - 6

JO - Applied Physics Express

JF - Applied Physics Express

SN - 1882-0778

IS - 7

M1 - 076101

ER -