A Concept Design of TES X-ray Microcalorimeter Array with Different Thickness Absorber Toward the Observation from 50 eV to 15 keV for STEM-EDS

Tasuku Hayashi, Haruka Muramatsu, Ryohei Konno, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Akira Takano, Keisuke Maehata, Toru Hara

研究成果: ジャーナルへの寄稿記事

抜粋

We herein report a concept study of a transition edge sensor (TES) X-ray microcalorimeter array with two different thickness absorbers. We developed an energy-dispersive X-ray spectroscope (EDS) with a 64-pixel TES array and installed it on a scanning transmission electron microscope (STEM) for material analysis. One of the key applications of the proposed system is the microanalysis of astromaterials, for which the relative abundance of light elements such as boron, carbon, and oxygen against silicon are crucial. However, the line sensitivity below ∼ 500 eV for the our STEM TES EDS system was not enough to detect the X-ray from light elements because of the relatively high continuum emission and low detection efficiency, which occurs due to the X-ray window and the optical blocking filters. A simple solution to increase line sensitivity at low energy is the adoption of thin X-ray absorbers that leads to an improvement in the energy resolution. However, doing so causes the sensitivity to decrease for high energy lines. Utilizing the spot-size dependence of the polycapillary X-ray optics on energy, which are used in the STEM TES EDS system, we studied a design in which thin absorbers are distributed on the outer area of detector. We optimized the design using the raytracing analysis of optics. A thin (300 nm) absorber is placed on the 52 outer pixels, while a thick (3.5 μ m) absorber is placed on the central 12 pixels. The thin pixels detect approximately 50–60% of the total counts in 0.1–2 keV, while the central thick pixels detect approximately 50–80% of the total counts in 2–10 keV. We also demonstrated the fabrication process of two-thickness absorber arrays.

元の言語英語
ページ(範囲)908-915
ページ数8
ジャーナルJournal of Low Temperature Physics
199
発行部数3-4
DOI
出版物ステータス出版済み - 5 1 2020

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

フィンガープリント A Concept Design of TES X-ray Microcalorimeter Array with Different Thickness Absorber Toward the Observation from 50 eV to 15 keV for STEM-EDS' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用