A far-infrared sensor with a subwavelength structured absorber

Yoshimi Ohta, Yoshikazu Arakawa, Takafumi Fukumoto, Yasuhiro Fukuyama, masaki Hirota

研究成果: ジャーナルへの寄稿記事

抄録

A thermoelectric far-infrared sensor with a subwavelength structured (SWS) absorber is presented. The sensor has a low cost potential because it is fabricated with the conventional CMOS manufacturing process and micromachining technology. To increase the responsivity of the sensor, we have developed the SWS absorber that has high infrared absorptivity of more than 80 %. The sensor achieved high responsivity of 3,900 VAV. The sensor has external dimensions of 100 μm × 100 μn. The fabricated SWS absorber has 4 μn pitch and 1.9 μm height. The SWS absorber effectively reduces surface reflection loss over a wide spectral region and enhances the absorptivity. We observed that the sensor with the SWS absorber had 20 % higher responsivity than that with the flat surfaced absorber. Copy; 2010 The Institute of Electrical Engineers of Japan.

元の言語英語
ジャーナルIEEJ Transactions on Sensors and Micromachines
130
発行部数7
DOI
出版物ステータス出版済み - 8 18 2010
外部発表Yes

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Infrared radiation
Sensors
Micromachining
Engineers
Costs

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Mechanical Engineering

これを引用

A far-infrared sensor with a subwavelength structured absorber. / Ohta, Yoshimi; Arakawa, Yoshikazu; Fukumoto, Takafumi; Fukuyama, Yasuhiro; Hirota, masaki.

:: IEEJ Transactions on Sensors and Micromachines, 巻 130, 番号 7, 18.08.2010.

研究成果: ジャーナルへの寄稿記事

Ohta, Yoshimi ; Arakawa, Yoshikazu ; Fukumoto, Takafumi ; Fukuyama, Yasuhiro ; Hirota, masaki. / A far-infrared sensor with a subwavelength structured absorber. :: IEEJ Transactions on Sensors and Micromachines. 2010 ; 巻 130, 番号 7.
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