A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

Jianxun Hong, Andrew M. Spring, Feng Qiu, Shiyoshi Yokoyama

研究成果: Contribution to journalArticle

3 引用 (Scopus)

抜粋

We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was −3.5 dB which corresponds to a peak coupling efficiency of −1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.

元の言語英語
記事番号12988
ジャーナルScientific reports
9
発行部数1
DOI
出版物ステータス出版済み - 12 1 2019

All Science Journal Classification (ASJC) codes

  • General

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