A high fill-factor comb-driven XY-stage with topological layer switch architecture

K. Takahashi, M. Mita, H. Fujita, H. Toshiyoshi

研究成果: Contribution to conferencePaper査読

抄録

We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.

本文言語英語
ページ2001-2002
ページ数2
出版ステータス出版済み - 2005
外部発表はい
イベントIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, 日本
継続期間: 12 6 200512 9 2005

その他

その他IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
国/地域日本
CityTakamatsu
Period12/6/0512/9/05

All Science Journal Classification (ASJC) codes

  • 工学(全般)

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