A MEMS digital mirror array integrated with high-voltage level-shifter

S. Maruyama, Koji Takahashi, H. Fujita, H. Toshiyoshi

研究成果: 著書/レポートタイプへの貢献会議での発言

4 引用 (Scopus)

抄録

This paper reports the design, fabrication and demonstration of MEMS electrostatic digital mirror array (8 channels) integrated with 40V level-shifter drivers by the CMOS-first MEMS-last processing technique. A CMOS chip of high voltage level-shifter array (2.9 mm x 2.9 mm) was pre-fabricated on an 8-μm-thick SOI wafer, and micromechianical structures were post-processed by deep reactive ion etching (DRIE) in the nearby reticle area for monolithic integration. The mirror array has been developed for a fiber-optic wavelength selective switch (WSS) application.

元の言語英語
ホスト出版物のタイトルTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ2314-2317
ページ数4
DOI
出版物ステータス出版済み - 2009
外部発表Yes
イベントTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, 米国
継続期間: 6 21 20096 25 2009

その他

その他TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
米国
Denver, CO
期間6/21/096/25/09

Fingerprint

MEMS
Mirrors
Reactive ion etching
Electric potential
Fiber optics
Electrostatics
Demonstrations
Switches
Fabrication
Wavelength
Processing

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

これを引用

Maruyama, S., Takahashi, K., Fujita, H., & Toshiyoshi, H. (2009). A MEMS digital mirror array integrated with high-voltage level-shifter. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2314-2317). [5285899] https://doi.org/10.1109/SENSOR.2009.5285899

A MEMS digital mirror array integrated with high-voltage level-shifter. / Maruyama, S.; Takahashi, Koji; Fujita, H.; Toshiyoshi, H.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2314-2317 5285899.

研究成果: 著書/レポートタイプへの貢献会議での発言

Maruyama, S, Takahashi, K, Fujita, H & Toshiyoshi, H 2009, A MEMS digital mirror array integrated with high-voltage level-shifter. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285899, pp. 2314-2317, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, 米国, 6/21/09. https://doi.org/10.1109/SENSOR.2009.5285899
Maruyama S, Takahashi K, Fujita H, Toshiyoshi H. A MEMS digital mirror array integrated with high-voltage level-shifter. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2314-2317. 5285899 https://doi.org/10.1109/SENSOR.2009.5285899
Maruyama, S. ; Takahashi, Koji ; Fujita, H. ; Toshiyoshi, H. / A MEMS digital mirror array integrated with high-voltage level-shifter. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 2314-2317
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