The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.
|ジャーナル||Materials Science Forum|
|出版ステータス||出版済み - 1 1 2002|
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering