A method of reducing micropipes in thin films by using sublimation growth

Naoki Oyanagi, Shin Ichi Nishizawa, Kazuo Arai

研究成果: Contribution to journalArticle査読

1 被引用数 (Scopus)

抄録

The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.

本文言語英語
ページ(範囲)107-110
ページ数4
ジャーナルMaterials Science Forum
389-393
1
DOI
出版ステータス出版済み - 1 1 2002
外部発表はい

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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