A micro laser Doppler velocimeter designed for a wafer-level packaging process

N. Morita, T. Akiyama, H. Nogami, Y. Hayashida, E. Higurashi, T. Ito, R. Sawada

研究成果: 著書/レポートタイプへの貢献会議での発言

2 引用 (Scopus)

抜粋

We develop a micro laser Doppler velocimeter (μ-LDV), designed for fabrication via a wafer-level packaging process for small size and mass production. This sensor is only 1/10,000th the volume of typical commercial LDVs. We successfully performed velocity measurement of moving solid plates and a flowing liquid with suspended particles by FFT analyzing signals obtained by our proposed μ-LDV. It can measure the velocity of any material that by itself or by constituent particles - bubbles, cells, emulsion phases, etc. - can scatter irradiated light: examples include solids like aluminum and cardboard or fluids like water, oil, and air.

元の言語英語
ホスト出版物のタイトル2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
出版者Institute of Electrical and Electronics Engineers Inc.
ページ480-483
ページ数4
ISBN(電子版)9781479989553
DOI
出版物ステータス出版済み - 8 5 2015
イベント18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, 米国
継続期間: 6 21 20156 25 2015

出版物シリーズ

名前2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

その他

その他18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
米国
Anchorage
期間6/21/156/25/15

    フィンガープリント

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

これを引用

Morita, N., Akiyama, T., Nogami, H., Hayashida, Y., Higurashi, E., Ito, T., & Sawada, R. (2015). A micro laser Doppler velocimeter designed for a wafer-level packaging process. : 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 480-483). [7180965] (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7180965