A micro laser Doppler velocimeter designed for a wafer-level packaging process

N. Morita, T. Akiyama, H. Nogami, Y. Hayashida, E. Higurashi, T. Ito, R. Sawada

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    2 被引用数 (Scopus)

    抄録

    We develop a micro laser Doppler velocimeter (μ-LDV), designed for fabrication via a wafer-level packaging process for small size and mass production. This sensor is only 1/10,000th the volume of typical commercial LDVs. We successfully performed velocity measurement of moving solid plates and a flowing liquid with suspended particles by FFT analyzing signals obtained by our proposed μ-LDV. It can measure the velocity of any material that by itself or by constituent particles - bubbles, cells, emulsion phases, etc. - can scatter irradiated light: examples include solids like aluminum and cardboard or fluids like water, oil, and air.

    本文言語英語
    ホスト出版物のタイトル2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
    出版社Institute of Electrical and Electronics Engineers Inc.
    ページ480-483
    ページ数4
    ISBN(電子版)9781479989553
    DOI
    出版ステータス出版済み - 8 5 2015
    イベント18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, 米国
    継続期間: 6 21 20156 25 2015

    出版物シリーズ

    名前2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

    その他

    その他18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
    Country米国
    CityAnchorage
    Period6/21/156/25/15

    All Science Journal Classification (ASJC) codes

    • Instrumentation
    • Electrical and Electronic Engineering

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