A multi-layer stacked all sol-gel fabrication technique for vertical coupled waveguide

Ahmad Syahrin Idris, Sampad Ghosh, Haisong Jiang, Kiichi Hamamoto

研究成果: Contribution to journalArticle査読

3 被引用数 (Scopus)

抄録

A multi-layer vertically stacked all sol-gel fabrication technique on bulk silicon is proposed to realize vertical coupling from planar waveguides to 3-dimensional structures. The all sol-gel fabrication technique realizes the capability to stack ZnO sol-gel core layer and SiO2 sol-gel cladding and core separation layers. A major issue with sol-gel based fabrication is the appearance of cracks on the sol-gel layer, and these were improved by a slow cooling process of 1°C/min after 500°C temperature annealing in addition to a SiO2 surface cleaning using photoresist remover. As a result, a multi-layer vertically stacked structure with a ZnO core layer thickness of 300 nm and SiO2 cladding/core separation layer thickness of 1.5 μm was successfully fabricated on bulk Si.

本文言語英語
ページ(範囲)12-17
ページ数6
ジャーナルEvergreen
4
2-3
DOI
出版ステータス出版済み - 9 2017

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • セラミックおよび複合材料
  • 表面、皮膜および薄膜
  • 管理、モニタリング、政策と法律

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