A new fabrication process of field emitter arrays using silicon delamination by hydrogen ion implantation

D. Sasaguri, T. Asano

研究成果: 著書/レポートタイプへの貢献会議での発言

元の言語英語
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 1998
ホスト出版物のサブタイトル1998 International Microprocesses and Nanotechnology Conference
編集者Hyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
出版者Institute of Electrical and Electronics Engineers Inc.
ページ71-72
ページ数2
ISBN(電子版)4930813832, 9784930813831
DOI
出版物ステータス出版済み - 1 1 1998
イベント1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, 大韓民国
継続期間: 7 13 19987 16 1998

出版物シリーズ

名前Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
1998-July

その他

その他1998 International Microprocesses and Nanotechnology Conference, MNC 1998
大韓民国
Kyoungju
期間7/13/987/16/98

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Nuclear and High Energy Physics
  • Computer Science Applications

これを引用

Sasaguri, D., & Asano, T. (1998). A new fabrication process of field emitter arrays using silicon delamination by hydrogen ion implantation. : H. J. Yoo, S. Okazaki, J. Ahn, O. Kim, & M. Komuro (版), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference (pp. 71-72). [729970] (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; 巻数 1998-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1998.729970