A novel particle sizing method for nano abrasives in CMP slurry by using fluorescent nano probe

研究成果: Contribution to journalArticle査読

抄録

In this study, a novel particle sizing method is proposed based on Brownian diffusion analysis for abrasive particles using fluorescent probing. A fluorescent probe is used to measure the average dynamic viscosity of the nanoparticle dispersion in a solvent. By measuring both the average dynamic viscosity and the size of the nanoscale abrasive particles simultaneously, the uncertainty of the particle sizing is considered to be improved based on the viscosity compensation for the Brownian diffusion of nanoparticles. In this research, the authors investigate the difference between the nanoviscosity and the shear viscosity of the solvent to verify the efficacy in using viscosity compensation for nanoparticle sizing.

本文言語英語
ページ(範囲)754-760
ページ数7
ジャーナルInternational Journal of Automation Technology
11
5
DOI
出版ステータス出版済み - 2017

All Science Journal Classification (ASJC) codes

  • 機械工学
  • 産業および生産工学

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