A novel particle sizing method for nano abrasives in CMP slurry by using fluorescent nano probe

研究成果: ジャーナルへの寄稿記事

抄録

In this study, a novel particle sizing method is proposed based on Brownian diffusion analysis for abrasive particles using fluorescent probing. A fluorescent probe is used to measure the average dynamic viscosity of the nanoparticle dispersion in a solvent. By measuring both the average dynamic viscosity and the size of the nanoscale abrasive particles simultaneously, the uncertainty of the particle sizing is considered to be improved based on the viscosity compensation for the Brownian diffusion of nanoparticles. In this research, the authors investigate the difference between the nanoviscosity and the shear viscosity of the solvent to verify the efficacy in using viscosity compensation for nanoparticle sizing.

元の言語英語
ページ(範囲)754-760
ページ数7
ジャーナルInternational Journal of Automation Technology
11
発行部数5
DOI
出版物ステータス出版済み - 1 1 2017

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Abrasives
Viscosity
Nanoparticles
Shear viscosity
Compensation and Redress

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

これを引用

A novel particle sizing method for nano abrasives in CMP slurry by using fluorescent nano probe. / Hayashi, Terutake; Seri, Toshiki; Kurokawa, Syuhei.

:: International Journal of Automation Technology, 巻 11, 番号 5, 01.01.2017, p. 754-760.

研究成果: ジャーナルへの寄稿記事

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