A novel Parylene/Al/Parylene sandwich protection mask for HF vapor release for micro electro mechanical systems

Akio Higo, K. Takahashi, H. Fujita, Y. Nakano, H. Toshiyoshi

研究成果: 著書/レポートタイプへの貢献会議での発言

2 引用 (Scopus)

抄録

We have developed novel mask materials against HF Vapor release for MEMS/NEMS. Parylene-C has a tolerant material against moisture pass, and then, thin aluminum layer has also tolerant against HF vapor. We combined them together for high tolerance and we have successfully obtained completely non-etched silicon oxide layer under HF vapor exposure by Parylene/Al/Parylene sandwich structure.

元の言語英語
ホスト出版物のタイトルTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ196-199
ページ数4
DOI
出版物ステータス出版済み - 12 11 2009
イベントTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, 米国
継続期間: 6 21 20096 25 2009

出版物シリーズ

名前TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

その他

その他TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
米国
Denver, CO
期間6/21/096/25/09

Fingerprint

Masks
Vapors
NEMS
Sandwich structures
Silicon oxides
MEMS
Moisture
Aluminum

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

これを引用

Higo, A., Takahashi, K., Fujita, H., Nakano, Y., & Toshiyoshi, H. (2009). A novel Parylene/Al/Parylene sandwich protection mask for HF vapor release for micro electro mechanical systems. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 196-199). [5285531] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285531

A novel Parylene/Al/Parylene sandwich protection mask for HF vapor release for micro electro mechanical systems. / Higo, Akio; Takahashi, K.; Fujita, H.; Nakano, Y.; Toshiyoshi, H.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 196-199 5285531 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

研究成果: 著書/レポートタイプへの貢献会議での発言

Higo, A, Takahashi, K, Fujita, H, Nakano, Y & Toshiyoshi, H 2009, A novel Parylene/Al/Parylene sandwich protection mask for HF vapor release for micro electro mechanical systems. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285531, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 196-199, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, 米国, 6/21/09. https://doi.org/10.1109/SENSOR.2009.5285531
Higo A, Takahashi K, Fujita H, Nakano Y, Toshiyoshi H. A novel Parylene/Al/Parylene sandwich protection mask for HF vapor release for micro electro mechanical systems. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 196-199. 5285531. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285531
Higo, Akio ; Takahashi, K. ; Fujita, H. ; Nakano, Y. ; Toshiyoshi, H. / A novel Parylene/Al/Parylene sandwich protection mask for HF vapor release for micro electro mechanical systems. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 196-199 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).
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