A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

研究成果: 会議への寄与タイプ論文

抄録

In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.

元の言語英語
出版物ステータス出版済み - 10 18 2015
イベント8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, 日本
継続期間: 10 18 201510 22 2015

その他

その他8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
日本
Kyoto
期間10/18/1510/22/15

Fingerprint

Abrasives
Fluorescence
Viscosity
Polarization
Brownian movement
Anisotropy
Composite materials

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

これを引用

Hayashi, T., Seri, T., & Kurokawa, S. (2015). A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. 論文発表場所 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, 日本.

A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. / Hayashi, Terutake; Seri, Toshiki; Kurokawa, Syuhei.

2015. 論文発表場所 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, 日本.

研究成果: 会議への寄与タイプ論文

Hayashi, T, Seri, T & Kurokawa, S 2015, 'A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry' 論文発表場所 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, 日本, 10/18/15 - 10/22/15, .
Hayashi T, Seri T, Kurokawa S. A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. 2015. 論文発表場所 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, 日本.
Hayashi, Terutake ; Seri, Toshiki ; Kurokawa, Syuhei. / A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. 論文発表場所 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, 日本.
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