A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

研究成果: Contribution to conferencePaper査読

抄録

In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.

本文言語英語
出版ステータス出版済み - 10 18 2015
イベント8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, 日本
継続期間: 10 18 201510 22 2015

その他

その他8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
国/地域日本
CityKyoto
Period10/18/1510/22/15

All Science Journal Classification (ASJC) codes

  • 産業および生産工学

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