In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.
|出版ステータス||出版済み - 10 18 2015|
|イベント||8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, 日本|
継続期間: 10 18 2015 → 10 22 2015
|その他||8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015|
|Period||10/18/15 → 10/22/15|
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