A new Thomson scattering measurement system, using a 1.064 μm YAG laser as the radiation source, has been developed for the purpose of enabling measurement of electron properties to be made in glow discharge plasmas containing reactive gases. Initial measurements made using the new system in an inductively coupled plasma gave results which were comparable with those obtained using previous Thomson scattering systems that used visible lasers.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||出版済み - 8 15 1999|
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